Table of Contents

Since there are other applicable auto switches than listed, refer to page 8-23-13 for details.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Air Cylinder

PD Mounting 20 12 12 13 24.2 6 25 12 10 (12) 13 26.7 6 32 12 10 (12) 13 30.2 6 40 12 10 (12) 16 34.6 8 50 13 13 20 40.6 10 63 13 13 20 47.1 10 HH Applicable Tubing O.D./I.D. Note) ( ): Long stroke Bore size (mm) 20 25 32 40 50 63 Applicable tubing O.D. (mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

Made to Order

CG1(K)R series Width across flats B2 Width across flats MA MI MM2 H2 MK Stroke MT ML + Adjustment MH + Stroke + Adjustment S + Stroke ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) CG1(K)R Series (mm) B2 10 13 13 17 19 19 H2 3.6 5 5 6 8 8 MA 12 17 17 19 24 24 MH 38 41 41 47 60 60 MI 14 20 20 25 32 32 MK 7 9 9 10 13 13 ML 18 18 18 24 32 32 MM2 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.25 M14 x

Compact 5-Port Solenoid Valve

14 15 16 L1 159.8 166.3 172.8 179.3 185.8 192.3 198.8 205.3 211.8 218.3 224.8 231.3 237.8 244.3 250.8 L2 56.4 62.9 69.4 75.9 82.4 88.9 95.4 101.9 108.4 114.9 121.4 127.9 134.4 140.9 147.4 L3 185.5 198 198 210.5 210.5 223 223 235.5 235.5 248 248 260.5 273 273 285.5 L4 175 187.5 187.5 200 200 212.5 212.5 225 225 237.5 237.5 250 262.5 262.5 275 L5 13 16 13 16 13 16 12 15 12 15 12 15 18 15 18

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

LEC-OM02704CN

UL/C-ULK5 13 19 13 13.6 (1) (a) () SD 1(4.12) (b) ( ) (c) () 13 20 13 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1. ()(FR-BIF()) 2.

CQ2

16 16 18.5 13.5 11.5 14 D-F9W D-F9WV D-F9BAL D-A7 D-A80 D-A9 D-A9V D-F9 D-F9V D-A79W Bore (mm) A 9.5 12.5 15.5 15.5 18 13 11 13.5 A 7 10 13 13 15.5 10.5 8.5 11 B 5.5 5 6.5 7 6 8.5 11.5 14.5 B 6 5.5 7 7.5 6.5 9 12 15 B 3 2.5 4 4.5 3.5 6 9 12 B 10 9.5 11 11.5 10.5 13 16 19 A 17 12 10 12.5 B 5 7.5 10.5 13.5 A 21 16 14 16.5 B 9 11.5 14.5 17.5 A 20 15 13 15.5 B 8 10.5 13.5 16.5 12 16 20 25 32

AC Servo Motor Driver (CC-Link Type ）

5 13.

SQ1000/2000

(A)(B) (A)(B) 4 2 4 2 When ordering with manifolds 5 13 5 13 For adding stations (R1) (P)(R2) (R1) (P)(R2) When only valves are required.

ZR

(Refer to page 13-3-37.)

AC Servo Motor Driver (CC-Link Type ）

5 13.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

CV/MVGQ

RB J Stroke range QY H H1 H2 HX I K MM N NA NN S ZZ F Q Eh8 B1 B2 D AL A Bore size (mm) 20 25 32 40 Up to 300 19.8 14 41 5 8 65.3 28 5 M8 x 1.25 15 24 M20 x 1.5 62 116 13 8 15.5 13 26 18 20 0 0.033 DUp to 300 45 120 13 22 14 6 8 70.5 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 62 19.5 17 32 10 22 26 0 0.033 Up to 300 13 25.8 16 45 6 8 76.5 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 64 122 19.5 17 32 12

CV/MVGQ

RB J Stroke range Q H1 NN F H MM ZZ H2 HX QY I K N NA S AL A B2 D Eh8 B1 Bore size (mm) 20 25 32 40 Up to 300 13 41 116 14 5 62 19.8 5 8 65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

Table of Contents

unit (digit) T 16-13-4 Temperature characteristics The amount of leakage TSJ 16-13-5 E N Ejector 16-13-3 U Noise resistance Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

Table of Contents

Refer to page 3-13-4.)