CE

resistance Endurance 10G; X, Y, Z directions, 3 times each Impact resistance 350g or less Weight Note 1) 90 phase difference input A phase I Multi Counter/Dimensions B phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

Compact Type

9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

4-channel Flow Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

CE

Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24-M3 x 0.5 B phase J A B C D A COM COM COM B 12 VDC GND F.G.

CE

Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24-M3 x 0.5 B phase J B C D A A COM COM COM B 12 VDC GND F.G.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Compact Type Dual-Rod Cylinder Series CXSJ

9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Auto Switch Guide

L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

4 x LD LH MM 2 x 4 3.2 N X Y N X Y S + Stroke LX LS + Stroke Z LZ ZZ + Stroke (mm) AL LH LS LZ MM G NA N LX LD D C A B 16 13 13 13 8 F Bore size K H1 H 8 6 6 5 H2 I 41 32 32 26 B2 54 47 47 40 B1 Stroke range 50 45 45 41 M10 x 1.25 M8 x 1.25 30 40 32 25 20 5.5 5.5 5 200 to 1000 150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21

Electric Actuator Triple Axis P&P Unit

Picture from above B: Recommended Bolt type M6 x 20 M5 x 18 M5 x 18 M4 x 16 M5 x 14 M4 x 14 Recommended tightening torque (N.m) 6.80.3 4.40.1 4.40.1 2.10.1 4.40.1 2.10.1 Motor Coupling Y Z Y Z A The motor mounting bolts must be procured by the customer. Please follow any other mounting standards if the customer provides any. ABCD GHJK LM NP 5.

MHF2

Note 1) Refer to page 21 for solid state switch common specifications. Note 2) Refer to page 21 for lead wire length.

100

HNBR/NBR Screws for assembly Steel (Trivalent chromated) (Disassembly is not possible. 13 Sound absorbing material 3 Non-woven fabric The silencer assembly must be replaced.) 25 B Multistage Ejector ZL3/ZL6 Series How to Order Replacement Parts z How to Order Supply Valve/Release Valve (For ZL3/ZL6) x How to Order Ejector Assembly (For ZL3/ZL6) JSY3140 L 5 Z ZL3 EJ1 A H ZL3 Ejector assembly

CRQ2

Symbol -XC12 to XC21 CRB2 CRBU2 L L B B 10 CRB1 End of rotation Rotation starting point 10 Additional Reminders MSU A The rotation starting point is the position of the flat and the key groove when the actuator is pressurized through connection port B. There are no air cushion effects in the rotating ranges of 70 shown in the diagram.

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

Auto Switch Guide

Be careful not to exchange the power cable (brown) with the output cable (black). 9-15-37 38 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

K M E CEP1 S J L B + Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder