Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

NCA1

See Pg 22 for auto switch options when using composite or stainless steel tube.

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

58 61 75 100 125 138 9 9 12 74 78 100 220 244 270 to 1000 to 1000 to 1000 10 Series MGZ Construction End lock Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 Description Lock holder Lock piston Stopper Collar Port block Pipe Lock spring Rubber cap Rod seal A Rod seal B Piston seal Piston gasket Tube rod gasket Cylinder tube gasket

Plate Cylinder with Lock Series MLU

HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

Air Cylinder NCA1 Series

See Pg 22 for auto switch options when using composite or stainless steel tube.

MLU

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LU LU L L Z + Stroke Z + Stroke RR RR ZZ + Stroke ZZ + Stroke (mm) (mm) LC 18 22 26 32 Applicable pin no.

Compact End Lock Cylinder Series CBQ2

0.1 0.3 Bore size (mm) CW CX N RR CZ L L1 Rod end male threads 32 20 18 36 7 28.5 M6 x 1.0 10 40 22 18 36 7 28.5 M6 x 1.0 10 50 28 22 44 8 33.5 M8 x 1.25 14 63 30 22 44 8 33.5 M10 x 1.5 14 Rod end nut L1 The clevis pin and snap ring are packed with the clevis.

Short Stroke Electric Actuator Series LX

(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.

MXF

F A A MX Lr MTS MXF16 Lr = 40 mm MY 0.20 0.07 0.07 CY 0.06 0.06 MXF16-75 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

15

22 23.5 22.5 20.5 25.5 40.5 51 51 67.5 76.5 Note 1) The values in the above list are used as a guide for the auto switch mounting position for end of stroke detection.

HRL

75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

HRX-OM-Y098

75 71 Operation manual (for installation/operation) (English 1, Japanese 1), Particle filter set for CH1, Particle filter set for CH2, DI filter for CH1, Accessories DI filter for CH2, Anchor bracket 2pcs.

Dedicated Controller

Therefore, never connect it to other equipment as this may cause fire or malfunction. 86 15 Regenerative Absorption Unit Series LC7R Dimensions 52 97 35 38 96 Operation window Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 35 Label DIN rail holding plate 22 22 Connector

Table of Contents

(Example) CUJ-M3 x 27l A A C B B D Axial mounting style Lateral mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting

1

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Series VQ Base Mounted Metal Seal/Rubber Seal

87.5 98 75 100 110.5 13 14 15 16 17 18 19 20 21 22 23 24 174 187.5 198 n L L1 L2 L3 163 187.5 198 196 212.5 223 218 237.5 248 240 250 260.5 251 262.5 273 273 287.5 298 185 200 210.5 207 225 235.5 229 250 260.5 262 275 285.5 284 300 310.5 How to Order Double check block VQ1000FPG F M5 C4 IN side port size OUT side port size Option None With blacket F C4 C6 One-touch fitting for

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b