LFE-OMZ0011

The operation for unlocking the key differs depending on the security code request [F81] (page 53).

HRX-OM-W038

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure

JXCx-OMY0006

Operation Instructions 53 13.1 Overview of the Operation Instructions 53 13.2 Operation procedure for Operation by Step No. 53 [1] Power on and Return to Origin position 53 [2] Positioning operation 54 [3] Pushing Operation 55 [4] HOLD 55 [5] Reset 56 [6] Stop 56 [7] Area output 57 13.3 Operation procedure for Operation by numerical instruction 58 14.

JXCx-OMY0004

Operation Instructions 53 13.1 Overview of the Operation Instructions 53 13.2 Operation procedure for Operation by Step No. 53 [1] Power on and Return to Origin position 53 [2] Positioning operation 54 [3] Pushing Operation 55 [4] HOLD 55 [5] Reset 56 [6] Stop 56 [7] Area output 57 13.3 Operation procedure for Operation by numerical instruction 58 14.

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3

JXCx-OMT0030CN

166 . 53 167 . 53 3 - LEC-G Series/ 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:

Regulator

28 59.8 27.8 43 AR40-D 70 91.5 35.5 40.5 28 41.5 28 68.8 27.8 52 1/8, 1/4 M421.5 M381.5 1/4, 3/8, 1/2 1/4, 3/8 AR40-06-D 75 93 35.5 40.5 28 41.5 28 68.8 27.8 52 AR50-D 90 125 43 45 28 51 27.8 61.5 AR60-D 95 155 45 50 28 51 27.8 61.5 3/4 M421.5 3/4, 1 1 Model Optional specifications Bracket mount Panel mount Q R U AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46 6.5 8 53

Filter Regulator

of piping (Pressure gauge (Port size) port size) maintenance Clearance for Dimensions Optional specifications Model Round type Round type Round type Standard specifications pressure pressure gauge pressure gauge (Semi-standard: Z) (With color zone) gauge P1 P2 A B C D E F G J K J J J AW20-D 1/8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

-1A SX5000-53-1A For U side 5 Round head SY3000-23-4 M3X26(Matt nickel combination screw plated) 6 Gasket SX3000-57-4 SX5000-57-6 7 DIN rail VZ1000-11-1Refer to page 14 SY3000*-OMJ0003-A -22- Specific Product Precautions 16 Be sure to read before handing.

CG1

7 7 8 47 52 53 63.5 75.5 75.5 95 95 110 (118) 130 (138) +l 45 (53) 22 38.5 45 3.5 115.5 (123.5) 137.5 (145.5) +l 45 (53) 25 3.5 4 5 5 5 7 6.6 117.5 (125.5) 139.5 (147.5) +l 51 (60) 30 6.6 9 11 11 14 54.5 16.5 22 22 8.5 11 13 14 16 135 (144) 155 (164) +l 55 (67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55

MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

KJ

inch) Connection thread UNF NPT Min. port size D Note) Weight (g) Model L1 L2 M KQ2F01-34 KQ2F01-35 KQ2F03-34 KQ2F03-35 KQ2F07-34 KQ2F07-35 KQ2F07-36 KQ2F09-34 KQ2F09-35 KQ2F09-36 KQ2F11-35 KQ2F11-36 KQ2F11-37 KQ2F13-36 KQ2F13-37 1 8 1 8 26.5 30.5 27 31 27.5 31 33.5 29 32.5 34.5 34.5 36.5 40.5 36.5 41 11.5 14.5 11 13.5 10.5 13.5 15.5 10.5 13.5 13 16 26 15 24 17 25 44 18 26 38 30 48 52 48 53

Vacuum Pad

Suction flo Suction flow r w rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

Vacuum Pad

Suction flo Suction flow r w rate Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow-rate characteristics graph, the suction flow rate is 5 L/min (ANR).

13

Work Exercise: Using a supply pressure of 0.45 MPa, when the ejector (ZH07S) picks up a workpiece that leaks air, the vacuum gauge indicated a pressure of 53 kPa. Calculate the leakage volume from the workpiece.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3 8 (10A) 6 1.1 26 8 1.6 38 10 0.5 2.2 53 1 2 (15A) 10 2.2 53 Note) Weight of grommet type. Add 60 g for conduit terminal type.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Pg.7 53<56.5> 3.5 to 7 VFS 142.5 MAX.10 71.5 VS Indicator light Cover diameter 1.5 Cross section 0.23mm2 VS7 < >: AC 82.5 75 0 1 01 02 M plug connector (M): VQZ225 (R)lMl 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 300 122.5<124.5> 61.5<62.5> 73.5 147 58.5<63.5> < >: AC 1.12-41 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 3 position closed center/exhaust

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rubber 12.6 (0.7) VQZ235 20 or less 15 or less 53 VQZ200 Metal 10.0 (0.55) VQZ225 18 or less 14 or less N.O. Rubber 12.6 (0.7) VQZ245 20 or less 15 or less Metal 16.2 (0.9) VQZ315 22 or less 17 or less N.C. Rubber 21.6 (1.2) VQZ335 33 or less 25 or less 77 VQZ300 Metal 15.3 (0.85) VQZ325 22 or less 17 or less N.O.

Ejector Valve Unit Series ZYY/ZYX 1

Note 1) Note 2) Nil 1 None With silencer Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 0.7 mm 1.0 mm 07 10 13-8-4 5 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 Lead wire/ Voltage suppressor specifications Plug-in type Serial transmission type LOZ