Table of Contents

Note 3) When selecting a power supply voltage, refer to How to Order on page 2. Note 4) Install a circuit breaker with a sensitivity of 30 mA or less.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

Free Mount Cylinder

Single Acting, Spring Extend D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 5.5 0.5(3) 5.5 4.5 1.5 2.5 14.5 All stroke 14.5 10.5 1.5(1) 6.5(4) 2(0.5) 7(4.5) 4(1.5) 9(6.5) 5.5(3) 10.5(8) 6.5(4) 11.5(9) 3.5 8.5 4 9 6 11 7 12 8.5 13.5 7.5 12.5 8 13 10 15 11 16 12.5 17.5 7.5 12.5 8 13 10 15 11 16 12.5 17.5 2.5 2.5 2 3 0 5 1.5 6.5 2.5 7.5 0.5 4.5 0 5 2 7 3.5 8.5

IR1000/2000/3000

Never use a lubricator on the supply side of the regulator, as this will positively cause the fixed throttle to become clogged and lead to malfunction. If lubrication is required for terminal devices, connect a lubricator on the output side of the regulator. 3.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

5 Port Solenoid Valve Series SV

SV1000 3 position 73 (.16) (B) 2 (A) 4 4 position dual 3 port 71 (.15) SOL.b SOL.a Single solenoid 74 (.163) 3 (EB) 5 (EA) Double solenoid 78 (.17) SV2000 1 (P) 3 position 83 (.18) 4 position dual 3 port 78 (.17) 4 position dual 3 port valve: N.C./N.O.

LEC-OM02704CN

A 1 () () A 2 LECSCSeries/ / *3) 1 1.5 3) 1 1 () A 3 1. 15P()-N() 2. L1L2L3(MC) (MC) 3. () () A 4 4.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

SYA3000/5000/7000

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 71.1 18.6 57 4 2 x M5 x 0.8 (Pilot port) 61 42 B A PE 38 46 B A Manual override P EB EA 2 x 4.3 (For mounting) 21 69 28.6 109.7 SYA SYJA VZA VFA VFRA 26.5 2 x 1.8 (Ventilation hole) VA 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1743

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Adjustment procedure is shown below. 1) Insert a wrench into the hexagon hole of the adjustment screw to loosen lock nut A. 2) Rotate the adjustment screw to right and left and move the cushion ring holder (stroke end) forward and backward to align the position with that of the external stopper. 3) After the stroke end adjustment is completed, retighten lock nut A. 3.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

positioning) 1/8 (EA, EB port) 3 position closed center/exhaust center/pressure center SYA7 20C8, N9 C10, N11 3 4 5 1/8 (Pilot port) One-touch fitting (A, B port) 2 4.2 (For manifold mounting) Applicable tubing O.D.: 8, 5/16" 10, 3/8" SYA7 20-02 3 4 5 1/4 (A, B port) Manual override (Non-locking) 1/4 (P port) 1.8 (Ventilation hole) 2 2.2 die-cast hole (For manifold gasket positioning)

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

-10AS G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

VSA4

0.31 0.31 0.30 0.33 b 0.34 0.47 0.51 0.34 0.47 0.51 0.34 0.44 0.48 0.33 0.48 0.53 Cv 1.0 1.2 1.4 1.0 1.2 1.4 1.0 1.2 1.3 1.1 1.2 1.3 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

plating 14 O-ring FKM Fluoro coating 15 O-ring FKM Fluoro coating 18 PF2M7(-L) Series Dimensions PF2M7m-C4/C6/C8/N7(-L) A 48 A 48 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 28 [mm] 28 Model A

Series AK1000

internals standard How to Order Port Number q w e r t AK14 02 T 4PL 6 6 S 0 0 Delivery pressure Bonnet option Code Delivery pressure Connections(Inletq, Outletw) Code Bonnet Standard Panel installation6) 1 to 30 psig (0.007 to 0.2 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 30 psig (-88kPa to 0.2 MPa) Code Connections NPT 1/4 inch NPT 3/8 inch NPT 1/2 inch 1/4 inch compression 3/8 inch

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN AMC Flow Characteristics (Initial conditions) Model A B D Dimensions (mm) AN202 to 402 Model Effective area (mm2) Weight (g) Port size R Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 1 4 3 8 1 2 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 1 AN302-03 60 AN402-04 90 0.5 Inlet pressure (MPa) Noise level (dB (A)) Construction/Parts/Dimensions 0.2 0.1 AN302/402 AN202 0.05

A_HEC-OM-J017

HEC ii CONTENTS CONTENTS Pages 1 Preparation for Communication -1-1 2 Specifications of Communication Method -2-1 3 Communication Format -3-1 3.1 Control code used for communication -3-1 3.2 Command code list -3-1 3.3 Communication procedures and format -3-2 3.4 Calculation of checksum -3-3 4 Details of Communication format -4-1 4.1 Temperature setting (without writing EEPROM) -4-1 4.2 Reading