MXQ

32 11.5 32 11.5 6.6 6.6 12 12 11 11 35 1.5 7 B A NN-M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 HA GA 6H9 depth 6 +0.030 0 Section AA Section BB (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 13.5 P = 10.5 18.3 14.1 8.4 60.6 8.6 45.5 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 24.6 23 59.5 3 5 E 3/5 E 3/5 E 5 3 E 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 5/16" PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6,

Series SV

With external pilot specification (Pitch) 22.3 P = 10.5 13.5 59.6 18.1 8.4 12.6 10 28.6 23 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 59 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P 1 P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 PE PE X x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, N1 4, N3 6, N7 One-touch fitting

MY1

36.5 32 Rc 1/4 16.5 26 25.5 10.5 22.5 24.5 23 20 54 Rc 1/8 "P" indicates a cylinder supply port.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 1 8 For 8, 5/16" Applicable tubing O.D.: 6, 1/4" (A, B port) One-touch fitting (Pitch) (Pitch) 9 18 P = 17.5 9 18 P = 17.5 (A, B port) 1/8 7.5 23 7.5 23 B B B B A A A A P = 17.5 21 (Pitch) L2 L1 5 + 13.8 15.2 + (4.9) 5.4 7.2 68.2 100.3 [102.5] (For mounting) 4 x 4.5 27.8 20 139.6 [144] 127 [131.4] 20 20 37.7 66.8 P EB EA B B B B B 100.6 A A

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

D-Y69l D-Y7P D-Y7PV D-Y7lW D-Y7lWV D-Y7BA D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-B5l D-B64 D-A9l D-A9lV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5

High Purity Fluoropolymer

A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

Micro Mechanical Valve Series VM1000

1.5 R port (3 port only) Symbol 2 port (A) 2 12 10 1 (P) 44 25.4 17 (A) 2 3 port 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 14 8.5 12 10 1 (P) 3 (R) Panel mounting hole * 0.5 MPa supply F .O.F .* 27 N T.T. 6.5 mm Max. 6 Push button (Extended) VM122-M5-32 (R, B, G, Y) A VM132-M5-32 (R, B, G, Y) A 23 38 T.T. 3 1.5 1.5 (75.6) (52.1) 23.5 22.1 30 10.5 R port (3 port only) Symbol 2 port (A) 2

AC

equipped with a limit indicator on which the prescribed pressure range can be viewed at a glance.

CL

a guide, use a solenoid valve with a large effective area for the unlocking solenoid.

CJ2

2.5 3 B 2.5 3 A 1.5 2 B 1.5 2 A 3 3.5 B 3 3.5 A 3.5 4 B 3.5 4 A 0.5 1 B 0.5 1 10 16 Auto Switch Mounting Height D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-C7/C80 D-H7/H7W D-H7NF D-H7BAL Auto switch model D-F7V D-F7WV D-F7BAVL D-C73C D-C80C D-H7C D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W Bore size (mm) Hs 17 20.5 Hs 19.5 23 Hs 20 23.5 Hs 16.5 19.5 Hs 17.5 20.5 Hs 23.5 26.5 Hs 20 23 Hs 23 26

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

23 23 23 27 Refer to page 375 for dimensions with connector cable. 316 5 Port Solenoid Valve 10-SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): 10-SYJ5223-M5 Built-in One-touch fitting: 10-SYJ5223G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43 3.5 11 5 B A B A Manual override 19 10 10.6 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) One-touch

CQ2

B A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.

SV

With External Pilot Specifications (Pitch) SV 22.3 P = 10.5 13.5 59.6 18.1 8.4 12.6 10 SZ 28.6 23 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 59 SY 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P 1 P 1 P 1 One-touch fitting PE PE X X SYJ One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" [1(P), 3/5(E) port] Applicable tubing O.D.:

Table of Contents

Calibration is easy with auto-preset function. 4 Installation of a group of sensors as a manifold style at the same site 3 Adsorption confirmation of a workpiece absorbed with water/oil Series ZSE50 Series PSE54 16-3-23 16-2-28 Adoption of a stainless diaphram enables to detect, even though water or oil is adhered to a workpiece and then made ingress to the sensing part.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

0.4

Note) The minimum bending radius of the D-sub connector cable is 20 mm. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 COM 572 VQC Series Plug-in Unit Base Mounted F IP40 compliant VQC1000/2000 Series Kit (D-sub connector) (L4) (L3) L2 L1 VV5QC11 (5.25) 63.5 51 35 28 1.5 P = 10.5 Manual override 13 (12) Indicator light 1.5 SV (5.5) SYJ B A A B A B A B A B A B A 2 93.5

MGG

A A A A A A B B 16 (23) B 21 (29) B B 18 (26) B B 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 20 27.5 27.5 27 24.5 25.5 27 28.5 27 24 30.5 29.5 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 16 (23) 21 (29) 18 (26) 25 30 30 29.5 27 25.5 27 28.5 27 24 30.5 29.5 22.5 (30.5) 21.5 (29.5) 20.5 (28.5) 17.5 (25.5) 16 (24) 22 (30) 19 (27) 32 33.5 33.5 33 30.5 26.5 28 29.5 28 25 31.5 30.5 24.5