VDW30/40-XF Temperature: 10 to 50C Relative humidity: 20% to 85%RH (No condensation) Liquid rings may not be used. 2. Storage When not using for a long time (more than approx. one month) after use with liquid, thoroughly remove all moisture to prevent rust and deterioration of rubber materials, etc. 503
From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1 kPa = 7.5 mmHg 1 kPa = 7.5 mmHg 101 101 Supply pressure (kPa) Supply pressure (kPa) Applicable adsorption nozzle range Applicable adsorption nozzle range 50 50 3. 2. 1. 20 20 ZSE ISE Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 1/4 to 1 turn Right Left PSE Adsorption nozzle diameter (mm) Adsorption nozzle
20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?
Dimensions IN574-95 (Sensor head + Display part) 20 40 230 D-F8N (2 pcs.) 110 Red tape 500 20 M12 Connector Tube (3 places) Green tape Sensor head Wiring Terminal no. Description Note 1 +15 V 1 2 1 2 5 2 Output signal 1 D-F8N 3 4 3 4 Display part 3 GND Socket connector A-coded (Normal key) Plug connector A-coded (Normal key) 4 Output signal 2 D-F8N DD1677
Security label -20 C to 60 C Ambient temperature OFF The strength of the Fibre-Optic communication is more than 2 dB. 3 3 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 PROFINET connector for Port1 (XF1) Push Pull connector EX245-FPS1: SCRJ EX245-FPS2: RJ45 Flashing The strength of the Fibre-Optic communication is more than 0 dB but less than 2
3 21 2 4 2147483647 0.01mm 22 1 23 0 ID1 24 H 2 065500 mm/s2 25 L 26 H 2 065500 mm/s2 27 L 28 1 030 10% 29 1 030 10% 30 1 0255 mm/s 31 1 030 10% 32 H 2 065500 0.01mm 33 L ID2 3453 ID1 ID3 5473 ID1 ID4 7493 ID1 ID5 94113 ID1 012 38 - 122 IF IN Data IDIF ID=1 ID=1 bit 7 6 5 4 3 2 1 0 I_Address 32 33 1 LEC1ON 0OFF 2 LEC0OFF 1ON 3 1 LEC1ON 0OFF 4 LEC1ON 0 0OFF 123 IN Data
VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
PA07 . 17 4.6 Auto tuning modePr.PA08 . 18 4.7 Input signal automatic on selectionPD01 . 18 4.8 Parameter setting by MR Configurator2TM . 19 4.8.1 Parameter reading . 20 4.8.2 Parameter setting (Ex. Control mode change) . 20 5.
20 to 908.0 (at 20 C)3.3 (at 20 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?