Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS25(L/R)/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEKFS25(L/R)EB Lead 6: LEKFS25(L/R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEKFS25(L/R)EA 10 15 Lead 12: LEKFS25(L/R)EA 10 Lead 20: LEKFS25(L/R)EH 5 Lead 20: LEKFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEKFS32(L/R)/Ball Screw Drive Horizontal Vertical

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

One-touch Fittings Series KQ2

(mm) Thread R(PT) Part No. H (Hex.)

VEX1

i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4 50 25 10

ARM10/11

(Full Span) Calibration angle 230 Limit indicator With limit indicator L side end block R side end block 17.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 28 SMC 56 56 SMC OPEN 1.5 20 7 7 20 28 18 26 26 18 22 32.5 32.5 R E V O C 14.5 Port Plug Bushing VVQ0 58A

ARM10/11

(Full Span) Calibration angle 230 Limit indicator With limit indicator L side end block R side end block 17.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 28 SMC 56 56 SMC OPEN 1.5 20 7 7 20 28 18 26 26 18 22 32.5 32.5 R E V O C 14.5 Port Plug Bushing VVQ0 58A

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc 1/8 1(P), 3(R) port Manual override (Non-locking) Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 2-4.5 (Mounting hole) 67.5 59 19 17 2 R P P R mPm 7 20 34 2.3 Pg.7 4-Rc 1/8 1(P), 3(R) port A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 300 (Lead wire length) n-Rc 1/8, M5 x 0.8 2(A) port 7 20 34 Courtesy of

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Compressed Air Preparation Filter

R V2 V1 Q1 Q21 Q1 C Y300T-D U E G Maintenance space 1 Q2 (Sizes 20, 40) Q1 (Size 30) AM30-03-D AMK30-03-D AMD30-03-D Standard specifications Optional specifications Bracket mount P A C E F G J M N Q1 Q2 R S U V1 V2 components Number of Model Size 20 2 1/8, 1/4 83.2 17.5 41.6 25 21 30 24 33 5.5 11.5 3.5 29 38 3 126.4 43.2 Size 30 2 1/4, 3/8 110.2 21.5 30 55.1 35 26.5 41 35 7 14 6 42.5

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H Width across flats 12 Width across flats 3 F Width across flats 12 Width across flats 3 F E E D C D C 3 2 3 2 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke (mm) (mm) Q: 6 Q: 8 H I J Stroke A B C D E F H I J Model R S R S 20 +10 3 0 ZPR20F10-0-A14 20 22 12.5 15.5 29.3 46.5 58.5 126.5 30 +20 +7 50 ZPR25F10-0-A14 25

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

R.

Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

SMC Electronic Switch Series Variations

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84

33

20 [dm3] : 4.2 x 103 [J/(kgK)] : 305 [K] (32 [C]) : 293 [K] (20 [C]) : 12 [K] (= T0 Tt) : 900 [s] (= 15 [min]) Example of current measurement units (Reference) : Unknown [cal/h] [W] : Water : (= r x V) [kgf] : 1 [kgf/L] : 20 [L] : 1.0 x 103 [cal/(kgfC)] Heat quantity by cooled substance (per unit time) Q Cooled substance Cooled substance weight m Cooled substance weight volume ratio c

AC Servo Motor Driver (CC-Link Type)

Servo motor speed (Rotation speed) Acceleration time constant 0 to 20 ms Set the time until the servo motor reaches the rated speed. (3000 r/min) Please set within allowable deceleration time constant of each actuator.