Regulator

03 03 03 3/8 04 04 04 04 1/2 4 + Nil Nil Nil Nil Without mounting option a Mounting B B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch EB EB EB EB PNP open collector 1 output EC EC EC EC NPN open

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

CG1

14 16 18 Bore (mm) ZZ GB S HH GA PD HD (17.5) (11.5) 20 25 32 40 50 63 20 25 32 40 50 63 70 70 72 80 95 95 (19.5) (11.5) 1 12 12 12 12 13 13 10 (12) 24.2 6 6 6 8 10 10 107 13 13 13 16 20 20 0.25 stroke (22.5) 1.25 2 3 10 (12) 26.7 112 (13) 10 (12) 30.2 114 (13) (25) 10 (12) 13 13 34.6 132 (13) (25) 11.5 14.5 40.6 155 47.1 155 The minimum stroke for rod boot equipped style is

Rubber seal 5 Port Solenoid Valve Series SYJ7000

] 20 20 20 20 Pg7 127.2 [131.6] 107.6 [112] 22 22 22 22 147.2 Max. 10 145.4 110.6 125.4 97.6 65.6 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 56 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 01 02 Grommet (G), (H): SYJ7 4022 12 G: Approx

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate

AR20-B to AR60-B

X425 w t e 03 q w t e r For high/low temperature Option/Semi-standard: Select one each for a to g.

Shock Absorbers and Rate Controls

(anilonl Pflt20tt -1, -2, -3 5.525.t2 N/A (lf)l/a.12 Ut{F 1T l . t 3 l.?0 3.11 .21 /A N/A t.12. .63 Prnt 25tI -2, -3 5.525.72N/A (lFllYB-12 UllF .38 t.l3 l.?0 3.41 N/A N/A 1.25 ,oJ Pfl22otf -1, -2, .3 8.14 8.34 rya(rr)r r4-l? utllF .38 l,13 l.?0 i.03 L I /A r{/ALl2 .tti, Pm225tI t, -2, -3 8 . 1 4 8.34N/A llF) lYo-12 UNt .38 l.t 3 t.?

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

ITV

wiring diagram Analog output, voltage type Brown Blue White Breathing hole M3 x 0.5 Monitor output voltage Black 2 14-8-11 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-8-12 13 Electro-pneumatic Regulator Series ITV1000/2000/3000 F.R.L.

MB1

Stroke (mm) Refer to the standard stroke table on Page 12.

HRX-OM-M005

Close the front door. 12. Connect the power cable to the power breaker on customer side (primary side).

VCL

Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Manifold Specifications

VP4 Stations P, R port thread type Series VZ300 Body ported 4(A), 2(B) port 03 3 stations VZS Nil Rc G NPT Adapter plate assembly 12 12 stations 00F VFS 1(P) port Rc 1/8 00N Manifold gasket Round head combination screw NPTF 00T VS4 Rc 1/8 3/5 (R) port Adapter plate VQ7 Option Adapter gasket EVS Blanking Plate Assembly Combinations of Solenoid Valve, Gasket and Manifold Base DXT192-13-1A

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89

Clean Regulator/Fluororesin Type

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 04 06 08 10 12 19 03 05 07 11 13 19 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable