Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Micro-Mist Separator with Prefilter Series AMH

V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04 Q) a. 0.3MPa 0.5MPa 0.7MPa ~ VMax.ftOWline-r<~ ~ V 80.02 Max.fIow line 0.3MPa 80.02 ---::'.'_. .. <:. --"i,, _ , .. " ... .::;::.. , 0 3000 6000 9000 12000 15000 Air flow rate Qlmin (ANR) rr ---:--~!'--.. -. .,.. -_---0.7MPa .:':: .,.' ..".'

Body Size: 1/2, Port Thread: Rc, Port Size: 1/2, AVL4000, Option: -, Voltage: -, Electrical Entry: -, Air Direction: -, Button Color: -

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Series SYJ3000. q SS5YJ3-20, SS5YJ3-21P The 3 port valve can be used by simply sealing off the unused R port with rubber plug VJ3000-331.

Applicable Auto Switch Model

Cylinder series Bore size (mm) 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BT -04 BT -04 BT -06 BT -08 BT -08 CDVS, CDLA, CE2, CNA CDL1 BT -12 BT -12 BT -16 BT -18A BT -20 CDS1 MDB/MDBB BT03 BT03 BT05 BT05 BT06 BT06 Part No. of auto switch mounting bracket (including bracket and screw) Cylinder series Bore size (mm) BBA1: For D-A5/A6/F5/J5 D-F5BAL is mounted on the cylinder with

Series AV is a soft start up valve for low-speed air supply to gradually raise initial pressure in an air system and for quick exhaust by cutting off air supply. OSHA compliant, lockable soft start valve, Large effective area, Low power consumption, Modular design, SOFT START-UP VALVE W/ LOCKOUT, VALVE, SOFT START LOCKOUT, 241, 1 lb

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

Table of Contents

Bore size (mm) 4, 6, 8, 10 Port size M3 x 0.5 6 8 or more Stroke (mm) AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

AMR3000 to 6000

06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

CC

RS Q G Valve A If the converter is positioned lower than the cylinder: RS H A Drain port (Piping port) After filling with oil as described in step 4 above, close the oil filler plug. Then, introduce air pressure of approximately 0.05 MPa into the converters air port to push the oil into the cylinder.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

JXCx-OMT0061CN

(P.29) CC-Link 11CC-Link 11 0 () 10 11.2 (P.50) 4.3 PLC PLC PLC CC-Link Ver. 1.10 Ver.2.00 CC-Link (Q ) PC :QCPU(Q ) PC :Q00UJ (RxRy)(RWrRWw) 10.1 (P.32)PLC (Rx) X1000 (Ry) Y1000 (RWr) W0 (RWw) W1000 (SB) SB0 (SW) SW0 PLC LECPMJ 1 LECPMJ 2 2 Ver.1 4.1 (STATION NO. B RATE) (P.17) PLC 18 - 5. CN1~5 5.1 CN1: DC24V CN1 (DC24V) 6.



Manifold can be mounted to VEX1B33, VEX1230 3. 14-6-2 3 Precision Regulator Series VEX130 3 Specifications VEX1B33M5 01 VEX113 01 02 0 3 VEX123 01 02 0 3 VEX133 02 03 04 0 3 VEX153 04 06 10 0 3 VEX173 10 12 0 3 VEX193 14 20 0 3 VEX1A33M5 01 Model Operation Manual (Push locking slotted type) Manual handle (Push locking slotted type) and Air operated type Internal pilot External pilot can be