0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

CLK1

Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 Z + Stroke S + Stroke 1.5 27 2 CLK1GB: 19.5 40 57 97 ZZ + Stroke Approx.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example) SYJ3120-5M-M3, VJ3000-13-1 5 6 V S R 1 2 3 4 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC 200V AC 110V AC [115V AC] 220V AC [230V AC] (For manifold type 20) SYJ3 2 5 M 1 M3 0 Body ported Base mounted (4 port) 2 SYJ3 3 5 M 0 (For manifold use only.)

CQS

Refer to p.0-39 through 0-46 for Safety Instructions and common precautions.

LG1H

) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

mb1

0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

LEC-T1_C

L E C T 1 3 J G S 1 S 1 2 J 2 E 2 3m 1 6.43 2 6.3 9 TB 12 - 3. 3.1 (1) TB Ver.5.11 TB Ver2.1LECPA No.0 1 LECPA TB Ver2.1LECPA No. 1 ) TB Ver1.** TB Ver2.**/ / (2)Tree TB Ver.5.11 MENU Data No. 2 Data Monitor JOG Test Alarm Setting Ver1.** Ver2.** 12 TB Ver2.1*LECPANo.0 Monitor No. 2 JOG Test 1 LECPATB Ver2.1*LECPA Alarm Setting Ver1.

Modular F.R.L. Unit

0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC60 AC30 0.25 0.25 Set point Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.15 0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC40 0.25 Set point Outlet pressure MPa 0.2 0.15 0 0 0.2

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

bumper at both ends Lubrication Non-lube 0 to 250st: +1.0 , 251 to 1000st: +1.4, 1001st to: +1.8 JIS symbol Stroke length tolerance 0 0 0 Mounting orientation Unrestricted Mounting nut (2 pcs.)

MXS

0 !1 !2 !3 !4 !5 !6 !7 !8 !

MY1

adjusting bolt RB 2015 with adjusting bolt RB 0806 with adjusting bolt RB 1412 with adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt With adjusting bolt Configuration and shock absorber Fine stroke adjustment range (mm) 0 to 5.6 0 to 6 0 to 11.5 0 to 12 0 to 16 0 to 20 0 to 25 Stroke adjustment range When

I/O Configurator (NFC version)

The number of effective points is limited within the set range of the output size. 0 to 32 points (0 to 4 bytes) Increase and decrease by 8 points. d) Valve manifold 32 points/ 4 bytes Available output size e) Wireless communication Active/Idle Active Available If it is set to "Idle", the wireless communication is disconnected. f) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s 1 s Available

NCA1

to 140F (5 to 60C) Ambient & fluid temperature 2 to 20 in/s CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style

NCA1

to 140F (5 to 60C) Ambient & fluid temperature 2 to 20 in/s CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style

XL

Port S (10) remains pressurized and valve S (18) remains open.

CJ2X/CUX/CQSX/CQ2X/CM2X

(mm) Speed (mm/s) Displacement (mm) Acceleration curve Clean gas filter Acceleration curve 10 0 0 CE2 Operating direction IN Operating direction OUT 2.0 2.0 Clean gas filter Operating direction IN Operating direction OUT 1 ML2B 60 Clean bench (Class 100) 40 Displacement waveform C J G5-S 0.1 Supply rate 28.3 l/min Exhausted by relief port Displacement waveform 20 20 20 sec. 20 sec. 0 CV

CJ2X/CUX/CQSX/CQ2X/CM2X

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0 0.1 0.2 0.3 0.4 MK(2) 0.5 0.6 0.7 Laser dust monitor 1 Head side supply pressure (MPa) Head side supply pressure (MPa) RS Q G Laser dust monitor setting conditions 0.1 RS H A Stable low speed operation even at 0.5 mm/s (1 mm/s for 16 or smaller) is achieved.

Micro Mechanical Valve Series VM1000

VHS 2317 Series VZM400 How to Order 0 VZM45 01 01 S Made to Order (Refer to pages 2342 to 2345 for details.)

Fluoropolymer Piping Equipment

, it is not possible to set the flow rate to 0 when the number of needle rotations is set to 0.