Environment

OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75

Integrated Controller

Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Specifications Model Selection EQFS H Series EQY H Series Auto Switch Electric Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions Model EQFS16H EQFS25H EQFS32H EQFS40H Stroke [mm]1 50 to 500 50 to 800 50 to 1000 150 to 1200 Work load [kg]2 Horizontal 10 15 18 15 26 40 40 39.5 50 68 68 26 60 75

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 2 x M12 1/4, 3/8 [4(A), 2(B) port] One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 1/4" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 1/4" 3/8 [1(P), 3/5(E) port] U side D side (L4) L3 L5 30.1 (5.4) 4 x 6.2 (For mounting) [For Rc 1/4, 3/8] 13.3 DIN rail holding screw (For DIN rail mounting) 81.7 75

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

3 position 0.51 [0.38] 0.14 [0.10] 54 73 58 81 75 115 53 71 0.69 0.44 0.39 0.12 0.39 0.18 Body ported Base mounted 2 position C4 0.69 0.56 0.57 [0.41] 0.43 0.41 [0.41] 0.41 0.40 0.12 0.40 0.40 0.19 0.15 M5 x 0.8 (4 Onetouch fitting) 10-SYJ523--C4 84 72 126 0.37 [0.37] 0.37 0.10 [0.11] 0.10 82 3 position 0.4 [0.37] 0.15 [0.10] 54 73 58 81 75 115 53 71 0.70 0.47 0.40 0.12 0.36 0.19 2 position

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS32-10 S SS ZZ Z 10 104 134 40 20 114 144 50 30 124 154 50 40 134 164 50 21-/2210-/11-/12CXS32-20 CXS32-30 CXS32-40 CXS32-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 144 174 60 21-/2210-/11-/12100 194 224 90 CXS32-75 CXS32-100 75 169 199 70 21-/2210-/11-/1221-/2210-/11-/12859 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Specific Product Precautions Air Preparation Equipment

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

.+20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 32768 to 34868 -0 to -2100 -0.00 to -21.00 mA 0..10 V 0 to 1050 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

SL5200

(psig) 1.0 (25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

LG1H

Model Controller Allowable Moment (Nm) Allowable static moment Allowable dynamic moment LG1H20 Model Mounting orientation Load movement direction Pitching Rolling Yawing 71 79 75 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

SYJ300/500/700

N.O. 140 (80) 1/8 Base mounted (with sub-plate) 135 (75) 136 (76) 157 (97) V100 1/4 Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate.

SMC Basic Pneumatics

I v 4 3.5 3.380 40 I ltz 48.6 3.5 3.890 50 2 60.3 3.65 5.100 65 2 | n 76.1 3.65 6.510 75 3 88.9 4.05 8.470 100 114.3 45 12.100 Table 4.21 Pipe Size Specitication Stainless steel pipes Thse are primarily used when very large diameters in long straight main lines are required.

Large Bore Compact Cylinder Series CQ2

switches No protrusion from cylinder body Can be mounted on four sides CS1 1in = 25.4mm CQ2 Overall length mm Weight kg (lb) Series 180 219 16.6 (36.6) CQ2 200 226 20.6 (45.4) 180 30.4 (67.0) 385 CS1 200 39.5 (87.1) 390 Comparison with 100mm stroke and rod end male threads Variations Applicable auto switch models Rod end configuration Standard strokes Size Type Action Series 10 20 30 40 50 75

Precision Cylinder Series MTS

157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers 25 32 Bore size (mm) Part no.

Modular Type Regulator Series AR

Refer to pages 75 through 78 for safety instructions and F.R.L. unit precautions. 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 Mounting & Adjustment 0.3 0.3 Warning 1. Set the regulator while verifying the displayed values of the inlet and outlet pressure gauges. Turning the knob excessively can cause damage to the internal parts. 2.

Sine Rodless Cylinder Series REBR Direct Mount Type

Cushion stroke Max. operating pressure Pv (MPa) Allowable load weight Wv (kg) Stroke (mm) Model Model 25 30 30 30 REBH15 REBH25 REBHT25 REBHT32 7.0 18.5 18.5 30.0 REBH15 REBH25 REBHT25 REBHT32 0.65 0.65 0.65 0.65 75 Series REBH Stroke Adjustment The adjustment bolt is adjusted to the optimum position for smooth acceleration and deceleration at the time of shipment, and should be operated

3 Position Cylinder Series RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Compact Electro-pneumatic Regulator Series ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.