PSxx-OMU0005CN

5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p

Thermo-chiller

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

VQ7-6/7-8

Series VQ7-8: Manifolds P.22 How to Order Manifolds P.23 Manifold Dimensions (DIN Connector Type) P.24 Manifold Dimensions (Prewired Connector Type) Manifold Options P.25 to 27 Option Dimensions P.28, 29 Manifold Option Mounting Bolt Part Numbers P.30 Manifold Exploded View P.31, 32 Manifold Specifications Sheets P.33 to 36 Safety Instructions P.37 5 Port Solenoid Valve/Precautions P.38

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5351 (A) 4 (B) 2 VQ5350 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5451 VQ5450 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5551 (A) 4 (B) 2 VQ5550 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3 Description Material Note No. 1 2 3 Body

Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +

OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

RSH

(Resin or rolled steel) LVariation Standard stroke (mm) Bore size (mm) Series Mounting Action Rod end configuration Standard variation Built-in magnet Locking Cancel cap Proximity switch Option 15 20 30 40 20 32 50 63 80 P P P P P P P P P P P P P P P P P P P P P P P P P Double acting Lever style Double acting with spring RSH Flange Adjustable Single acting 4.3-1 Heavy Duty Stopper Cylinder

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Precision Regulator

0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

10.5 11.5 5 5 10 11.6 3 1 3 1 21.5 <30.9> 27[34] 25 + + + + + L2 3 (For mounting) 2-3.5 (1, 3 port) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 32.4[34.6] L1 <34.6> (Lead wire length) (Light/surge voltage suppressor) (Station n) (Station 1) 2 2 13 7.7 (Pitch) P=10.5 10.5 (2 port) M5 x 0.8 L plug connector (L) M plug connector (M) 32.5[34.7] <34.7> 11.6 38.1[45.1] <42> 42.3[44.5] <44.5> 27.5

MXQ

Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

IIIIIII

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

ITV

Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000 AF4000

Modular Type Filter Regulator Series AW

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

MY2

M5 x 0.8 1/8 1/4 "P" indicates cylinder supply ports.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

P port on both sides and exhaust from EA/EB port on both side.