VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

Vacuum Pad

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

LEC-OM02704CN

P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

High Vacuum Angle Valve, XL Series

P.4 to P.7 XLAV (With solenoid valve) Particulate free completely cleaned Bellows Seal 105 to 10-6 10-10 10-11 2 XLC Double acting P.8 to P.11 XLCV (With solenoid valve) Manual Electromagnetic Air operated XLF Single acting (N.C.)

XL

P.4 to P.7 XLAV (With solenoid valve) Particulate free completely cleaned Bellows Seal 105 to 10-6 10-10 10-11 2 XLC Double acting P.8 to P.11 XLCV (With solenoid valve) Manual Electromagnetic Air operated XLF Single acting (N.C.)

OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

MXQ

Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5

CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .

CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .