CEx-OMQ0013

d e. 6. f. g. ( ) h. i. 7. j. k. l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5. F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5.

Clean Rodless Cylinder Series CYP

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

IDX-OM-W032

IDX-OM-W032-D / Series IDFA22E-23C,K,L,R,T,V IDFA37E-23C,K,L,R,T,V IDFA55E-23C,L,R,T,V IDFA75E-23C,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General rules and safety requirements for systems and their components *2) JIS B8370 URLhttps:/

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Air Cooled Aftercooler Series HAA 1

Fan motor Outlet thermometer Model Selection (Flow Capacity l/min (ANR)) HAA7 HAA15 HAA22 HAA37 Model Outlet side air (COOL AIR) 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000 Inlet air temperature 4300 Cooling side air Cooler Conditions: Outlet temperature 40C, Ambient temperature 32C, Air pressure 0.7 MPa Drain 14-15-1 2 Series HAA How to Order Precautions 15 10 D 1

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Uniaxial Electric Actuator Series LJ1

(LJ1S Series only) C D Running accuracy Model C plane to A plane D plane to B plane LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 0.07 or less 0.03 or less 0.09 or less 0.12 or less 0.1 or less 0.1 or less 0.07 or less 0.06 or less 0.03 or less 0.015 or less 0.1 or less 0.1 or less B A Actuator control Programming from a PC Programming and start-up: easy programming is possible by means of the

Electric Actuator with Integrated Guide Series LTF

weight Space saving, light weight 50 40 46 33 60 74 LTF8 work piece mounting section dimensions LTF6 work piece mounting section dimensions 412mm 4.6kg 1000mm Values of the horizontal mounting type with standard motor and 100 mm stroke 357.5mm 2.2kg 600mm Overall length Weight Maximum stroke Table traveling accuracy Table traveling accuracy Lead screw Ground ball screw Rolled ball screw C D

IDX-OM-Y002

IDF60/70/80/90 Series 5.2 Regular maintenance 5-7 IDX-OM-Y002 Chapter 5 Checks, Maintenance and Adjustment (D) Replacement of the main valve (discharge valve) Purchase the replacement kit of the main valve and replace it referring to the attached Replacement Procedure. Replacement requires a specific tool.

IDX-OM-W029

E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E R11/2 360 1258 64 550 1350 290 388 680 414 50 13 IDU55E 855 1345 1440 R2 470 53 530 360 36 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-2 GWP 6 2 IDX-OM-W029 6 6-4 IDU22E-23 IDU37E-23 GFCI For Option R GFCI R GFCI For

Both series are available in a normally closed or normally open styles.3 port, pilot poppet type valve , Available with power saving circuit to reduce power consumption , Port sizes from 1/8 to 1/2, depending on series , Thread types: Rc, G, NPT, NPTF VNA/B/C/D 2-WAY MEDIA VALVE. DIN CONNECTOR ASSY. VALVE. VNA/B/C/D NO SIZE RATING. 0.06232 lb. 22.

PF2A/PF2W

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C73L--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 3M

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C73L--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 3M, Number: S (1 pc.)

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M, Number: S (1 pc.)

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: Ø16 (5/8"), Stroke: 700 (7"), Port Location: Perpendicular, Auto Switch: C80C--Reed, DC Volt >5 <24, AC Volt <100, Connector, 0.5M