-- NCM seies

D -With Built in Magnet (Not available as std. on single acting models, XB6 & XB7) I XBg -Low Friction I XCO -Stainless Steel Rod LNumber of Auto-swircnes -2 pcs. S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

70pvpump

(1) 5 to 55 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 VC Outlet air atmospheric pressure dew point (C) 20 VDW Inlet air flow rate l/min (ANR) (2) 625 62 125 250 375 VQ Outlet air flow rate l/min (ANR) 50 100 200 300 500 VX2 Purge air flow rate l/min (ANR) (3) 12 25 50 75 125 VX Inlet air pressure (MPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

EX510-GDN1.eng

COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed with power supply turned off.

EX510-GPR1.eng

COM C COM C is receiving data: Lights up 2 COM C is having no data to receive: Goes off A. For separate power supply use B. For single power supply use COM D COM D is receiving data: Lights up 2 COM D is having no data to receive: Goes off 1: Refer to "Operation Manual" for the extension diagnosis information. 2: It is lit when input unit is connected and communicating normally.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VT VP How to Order Manifold Assembly (Example) VG VP D side U side 1 3 4 5 Stations VQ VQZ215-5L 4set VQZ 2 VV3QZ25-05C6C 1 set (C kit 5 stations manifold base) VVQZ200-10A-5 1 set (Blank plate assembly) VQZ215-5L 4 sets (Single solenoid) VZ VS Prefix "" mark to valves etc.to be assembled on the manifold. Write sequentially from the 1st station on the D side.

MHS

O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3

EX500-GPR1A.eng

Application 8 7 6 5 4 3 2 Communication connector 1 9 Ground terminal Used for grounding EX500 Part Names Station number switch protective cover Set address and bus terminator by using the switches under this cover. ( Note2 ) Display Communication port D ( COM D ) Communication port C ( COM C ) Communication port B ( COM B ) Communication port A ( COM A ) Power supply connector Display the

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

/N.O. 1 2 3 Station D side U side 4 position dual 3 port valve: N.C./N.O. Manual override Pilot specifications Non-locking push type Nil Internal pilot Nil R External pilot Slotted locking type D Note) 4 position dual 3 port valves are not available with external pilot specification.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Read the allowable load mass from the graph. 1.5 1 Clamp arm 0.5 Load center of gravity Extension arm 0 50 75 100 125 150 175 200 Shim Clamping block Distance to the center of gravity [mm] Fulcrum L Arm opening angle: 90, Distance to the center of gravity L: 125 mm Calculation example With an arm opening angle of 90 and a 125 mm distance to the center of gravity, according to the graph, the

EXxx-OMN0029CN

EX600-ZMB2 (3)DIN DIN (4)DIN (5)(M4X20)(EX600-ZMA2) 0.70.8 Nm DIN DIN EX600-ZMA2 -16No.EX-OMN0029CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) A B C (EX600-ZT1) -17No.EX-OMN0029CN-D SI EX600-S A SI 1 PNP() 2 NPN() TM DN DeviceNet No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 () 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -18No.EX-OMN0029CN-D

HRS100/150

Note 2) See specification table for refrigerant used in the product. 125 A

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

7

size P a b d e f 3/4 1 50.5 55.5 77.5 85.5 74 81 51 58 45.5 49.5 VXD2 VXD2 5 C 6 D ( ): Denotes the Normally Open (N.O.) dimensions. 151 For Heated water/High temperature oil VXD Series 5 C 6 D Dimensions/VXD2 /2 Body Material: C37, Stainless Steel Conduit terminal (U2) E (V2) 34 C 32 25 T G1/2 M A IN OUT B K L F I 2 x P Port size (D) J Conduit (42) U E 280 C 45 T 23 G1/2 For Heated water

42

Example) -CDW Note 2) Combination of [C ] and [S ] is not available. U D U D Connector kit C Max. 16 stations Thread type Refer to page 534 (Grommet type) for wiring specifications. Nil Rc F G N NPT T NPTF Control unit Refer to pages 482 to 485.

•

C!} Width across flats 12 ) ' ;=Yw lll ~ ~ '" 1 I rf" >() I / ~ ~()lliJJ M ~~ ~ ,L (mm) .8 (mm) Model M C D E F G ;. K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.

Electro-Pneumatic Positioner Series IP8000/8100

D. 7 to 9:P368010-26 Applicable cable O.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Proper Auto Switch Mounting Position (Detection at Stroke End) E A B Reed auto switch: D-A93 Stroke B Stroke E Auto switch operating range Model A 100 40 50 150 30 75 125 150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.