VZS

from D side as the 1st one.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

P When mounted on the manifold, the common exhaust discharges the pilot and main valve exhaust through a common exhaust port to enable simple exhausting. 700 B 600 Max.operating speed (mm/s) Piping length1m JIS Symbol B A 500 Piping length5m A D SY (Single) 400 R P SYJ C 300 SX How to order valve with built-in speed controller SYJ5l 5l--lll l--l 200 VK Port size VZ 100 Config.

SYJ300/500/700

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Turntable Cylinder Series MGT

c Proper mounting positions (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper mounting positions (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-F9 type D-F9 W type 2 6 5 8 12 11 In order that adjacent switches do not misoperate, they should be set within 1mm of the proper mounting positions indicated in the table above.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 13 Series VQZ How To Order Manifold Connector Kit Preferred Option Program How To Order: VQZ100 Base Mounted Manifold VV3QZ 1 5 08 N7T C Option Series None DIN rail mounting (DIN rail standard length) External pilot 1 VQZ100 D R Manifold type 5 Base mounted Kit C Connector Number

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

CLA

ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VDW Series

Enter together in order, counting from station 1 on the D side.

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (

MX-OMP0051

RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6

Slider Type/Ball Bushing Bearing

B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.

Shock Absorbers and Rate Controls

l o E g ::.: # 2A 1 0 0 : 0 0.2 0.4 0.6 0.8 I 1.2 1.4 1.6 TOTAL ENEFIGY (in bs/c) (Ihousaids) TOTAL ENEFGY (inrbs,t) .,,' 9 . . ' . r n I c { d E o 8 E , d o . i E i d TOTAL ENEFIGY (iN]bS/C) (Thousands) TOTAL ENERGY (rnlbsc) |o c{ N 0 E o. 5 5 m TOTAL ENERGY (in'lbebJ rTho!sands) l{ote Minimum impact velocity fol PRO modls is 10 in./sec.

Digital Gap Checker

Description 1 DC (+) 18 6.5 2 N.C. 24 Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 3 DC () 36 4 OUT1 Unit: mm 1: Conforming to ISO1179-1 Stations 1 2 3 4 5 6 (49) 47 L1 38 76 114 152 190 228 18 2 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 ISA3-mm (DIN rail mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38