CYV

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

70pvpump

(1) 5 to 55 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 VC Outlet air atmospheric pressure dew point (C) 20 VDW Inlet air flow rate l/min (ANR) (2) 625 62 125 250 375 VQ Outlet air flow rate l/min (ANR) 50 100 200 300 500 VX2 Purge air flow rate l/min (ANR) (3) 12 25 50 75 125 VX Inlet air pressure (MPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Vacuum Equipment

Vacuum Area Diameter (Vacuum pressure: 84 kPa) after Vacuum Suction by Vacuum Pad (mm) Flat U Flat with ribs C Bellows B Deep D Large size H Type Large size bellows HB Material Size Part no.

SMC Electronic Switch Series Variations

All data given in a technical specification sheet is based on 25[C]. The temperature range is dependent on the product series. Normally SMC products are rated from 0 to 50[C] or 0 to 60[C]. The failure predict function allows the user to anticipate possible maintenance requirements. How does it work?

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Auto switch M12 M12 M12 M12 x 2 K #6 K #4 EX600-DX B, DX D M8 M8/M12 connector (Field-wireable/Pre-wired) EX600-DX C, DX C1 M12 M8 x 2 K #7 K #4 Only the M12 type connector is available for the 2-input type input block. Pre-wired type P Product Table Description Application No. SMC part no.

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Swivels

C D Dia.

LEC-OM02704CN

P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

I

Av o i d m o u n t i n g t h e v a l v e i n a p o s i t i o n w h e re i t w i l l b e s u b j e c t t o vibration. 2. Ensure that pipework is thoroughly clean and free of water and debris during installation. 3. U s e a t h r e e c o r e s c r e e n e d c a b l e f o r s i g n a l a n d p o w e r. C o n d u c t o r diameter minimum 0.5mmeach core 4.

42

Example) -CDW Note 2) Combination of [C ] and [S ] is not available. U D U D Connector kit C Max. 16 stations Thread type Refer to page 534 (Grommet type) for wiring specifications. Nil Rc F G N NPT T NPTF Control unit Refer to pages 482 to 485.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

CHKD/CHKG

Mounting bolt D C CHQ CHK CHK C Model Mounting bolt part no. C Model D D Mounting bolt part no.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

C85

6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

Vacuum Pad

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

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5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

They can be ordered in lots of 10 pieces. d D Series SY3000 SY5000 SY7000 Part No.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.