CHKD/CHKG Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
1 to 5 V 2.5% F .S. or less ZSM Note 3) No-voltage input (Solid state switch or reed switch), input 5 ms or more IP65 Operating: 0 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating and stored: 35 to 85% RH (No condensation) 250 VAC for 1 min, between all lead wires and enclosure 2 M or more (at 50 VDC) between all lead wires and enclosure 10 to 500 Hz with 1.5 mm amplitude
Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25
G H J K L Anchor bolt 406.4 609 609 609 962 962 962 1216 1216 361 510 510 510 824 824 824 1019 1019 440 650 650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100 1550 1650 1700 1700 550 645 740 740 750 750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l
Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
For pipe thread type F , a G thread conversion fitting set is included.
T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)
Head Flange: CG3GN Bore size Stroke With rubber bumper Width across flats KA GA GB 4 x FD 8 x J 2 x P F R0.5 H1 0 E 0.05 MM D FX 0.15 0 E 0.05 I B C Corner of the cover (20 to 63) H A AL Width across flats B1 Width across flats NA F FT C FX 0.15 S + Stroke ZZ + Stroke B End boss is machined on the flange for E.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .
F-91S F-87S FGFC5-60 FGFL3-40 Carbon steel F-88S FGFR5-60 FGFC5-60 150(6B) F-92S F-88S 280 240 166.6 23 22 FGFS5-60 FGFR5-60 Stainless steel F-89S AL-80S AI-18S FGFL5-60 FGFS5-60 F-93S F-89S FGFL5-60 Note) 2 pieces are required per filter unit. JIS10KFF is used for this flange. Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.)
A F However all brackets of valve element of VNB 1 to 4 are made of stainless steel.
O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3
1/8 81 M24 x 1.5 13 28 19 15 143 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 31 f8 7.5 1/8 87 M30 x 1.5 13 36 19 15 159 40 Up to 800 21 M33 x 2 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 34 f8 7.5 1/4 108 19 44 24 21 183 Axial foot type: CHML Width across flats B2 H N GA F N GB F Rc P Rc P 2 x NN Width across flats B1 Effective thread H2 H1 D I 4 x LD LH MM A K NC Width across
Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x
A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3) 0.05 0.05 0.05 0.04 0.04 0.04
F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)
F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)