Speed Controller with One-touch Fitting

30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 37 (39) AS32m1F-03-08PA 8 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-10PA 10 15.9 26.7 37.9 (38.3) 28 15.6 39 (41) AS32m1F-03-12PA 12 18.5 29.7 40.9 (41.3) 26.8 17 41 (42) AS42m1F-04-10PA 10 1/2 27 (28.6) 15.9 18.8 27.4 41.8 (42.6) 36.2 50.8 49.2 40.4 38.8 15.6 66 (72) AS42m1F-04-12PA 12 18.5 30.8 45.2 (46) 35.1 17 68

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.

51

157.5 Width across flats 19 length 4.5 20 44 16 32.5 60 6 57 20 35.5 121 41 26 16 9.5 110 M12 x 1.75 14 65 (6) 120 150 7 M26 x 1.5 100 Rc3/8 105 30 16 68 162 Width across flats 22 length 4.5 Technical Data Use a thin wrench when tightening the piston rod.

CHKD/CHKG

type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63 42 45 M30 x 1.5 9 30 58 125 90 67 23 66 7 68

CJP

24 4.5 33 6 M14 x 1.0 28 12 14 20 24.5 6 15.5 18.5 24 9 8 M5 x 0.8 31.7 6 25 8 17 2.9 29 5.5 42 MB1 Symbol S Z ZZ R Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st CA2 6 10 15 45.5 62.5 40.5 35.5 67.5 57.5 63.5 58.5 53.5 50.5 48.5 7 52.5 50.5 65.5 70.5 45.5 40.5 79 75.5 65.5 69 64 59 55.5 54 8 85.5 60.5 CS1 52 67 76 47 42 83 81 71 73 68

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

mounting groove (4 locations) 65 Width across flats 10 (4 locations) M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger opening port) H 4 x M6 x 1 (Piston rod thread and rack thread) 28.2 2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

0 5H9 ( ) depth 4 30 M 0.5 37.5 40 Z ZZ (NN 1) x H G 10.5 24 10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 ( ) depth 4 +0.030 0 6 NN x M6 x 1 thread depth 12 B A 5H9 ( ) depth 4 +0.030 0 Section AA Section BB GA HA (mm) ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68

SMC

M 0.5 37.5 40 Z ZZ (NN1) x H G 10.5 24 10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 depth 4 +0.030 0 6 NN-M6 x 1 thread depth 12 B A 5H9 depth 4 +0.030 0 Section AA Section BB GA HA (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 68

CL

M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke For long stroke refer to page 9-2-32. 9-2-30 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod With Mounting Bracket Foot style: CLG1LN Foot Style Without rod boot With rod boot ZZ Bore size (mm) BZ M W X Y LS LT LX LH LD LZ LC ZZ 202 219.5 222.5 246 182 197.5 200.5 226 117 127 128 142 3 3 3 3 50 57 60 68

CP95

style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size (mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

V 24 V, 48 V 100 V No Yes Yes R80C Connector Relay, Reed switch 2-wire 24 V R73 Grommet PLC 100 V R73C Connector T79 Grommet 2-wire 12 V Relay, T79C Connector Solid state switch 24 V PLC S79 IC circuit 3-wire (NPN) Grommet 5 V, 12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN 11-4-2 68

Possible to transfer a workpiece at low-speed.

A S G D L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU F H J JA JB JJ K Size Rotation angle 20 30 40 90, 180 50 25 2.5 63 (11) 14 34 14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14

Slider Type/Ball Bushing Bearing

24 40 M4 x 0.7 11 10.5 30 27 24 19 M8 x 1.0 6 40 20 3.5 16 60 17.5 85 103 77 1.0 0.5 12.5 30 60 M4 x 0.7 M8 x 1.0 8 68 26 4.3 20.5 80 PA dimensions are for split from center.

Micro Mechanical Valve Series VM1000

P.T. 4 Max. 6 R port (3 port only) (68) 30 38 24 10.5 16 Symbol 2 port (A) 2 12 10 1 (P) 3 port (A) 2 44 25.4 17 10 12 1 (P) 3 (R) 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 8.5 14 * 0.5 MPa supply F .O.F .* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Cross roller plunger VM122-M5-07A VM132-M5-07A VM122-M5-07SA VM132-M5-07SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across

0.4

assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 68

New

hole 2 x 3.4 Mounting hole z280 Q F D 11 Q F D G1/2 Vacuum For Oil Construction Dimensions Construction Dimensions 23 R C C R 1.2 1.2 E E 2 x P Port size 2 x P Port size B1 B1 B B Terminal part Faston connector 250 Series 11 9 6.5 15 (mm) VX2 Electrical entry Size Mounting bracket dimensions One-touch fitting B B1 C D E F Conduit Faston type P Q Q R R U U1 W X X1 Y 1 2 3 C6, C8 53.5 66 68

XLAQ/XLDQ

Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52 G 40 39 63 68

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-