30

21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13 17 17 17 19 19 19 22 24 24 27 Spare parts Rod end nut The basic type has one rod end nut attached, it is possible to

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D DDE 202-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

IDX-OM-Z004

G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) P (Port) W CH LH RR1 SS NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

S 6 50, 100, 150, 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com "n" pcs. n 8 50, 100, 150, 200, 250, 300 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Nil Without auto switch Adjuster option Nil Rubber stopper B Shock absorber Metal stopper One

ZP

p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101

VFR

or less 4.72 (4.55) VFR631 VFR630 39 0.17 9.3 39 0.15 9.3 3 4 (B) (A) 4 2 (B) (A) 4 2 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) VFR641 VFR640 38 0.14 8.9 1 3 4 150 or less Pressure center 38 [20] 0.10 [0.44] 8.7 [5.7] 9.3 150 or less 4.72 (4.55) VFR651 VFR650 3 4 1 40 0.16 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 Pressure center Model Port size Type of actuation Effective area

3 Port Air Operated Valve Series SYJA300

+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

ITV

IR 0.5 0.5 0.6 Set pressure (MPa) Set pressure (MPa) 0.4 Set point VEX 0.5 0.3 0.4 0.0 AMR 0.3 0.2 0.2 0.5 ITV 0.1 0.1 1.0 0.0 0.0 IC 0 50 100 200 150 0 50 100 150 200 250 0.8 0.2 0.4 0.6 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV203 VY1 G Repeatability Linearity Hysteresis 1.0 0.6 1.0 PPA 0.5 Output deviation factor (%F.S.)

Profile Design ISO/VDMA Air Cylinder Series CP95

A B C D E F G H P U Load [kN] Weight [g] Angle 32 M10x1.25 JA30-10-125 49.5 19.5 24 5 8 8 17 9 0.5 2.5 70 40 M12x1.25 JA40-12-125 60 20 31 6 11 11 22 13 0.75 4.4 160 5 50/63 M16x1.5 JA50-16-150 71.5 22 41 7.5 14 13.5 27 15 1.0 11 300 80/100 M20x1.5 JAH50-20-150 101 28 31 59.5 11.5 24 16 32 18 2.0 18 1080 Rod clevis GKM (DIN 71752), supplied with bolt and safety device Chromed steel Bore

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Consult P/A.

Low Differential Pressure Sensor

Set value correction by auto shift function Supply pressure normal Supply pressure drop Supply pressure increase F Reset function P-1 C-5 C-5 (P-3) (Differential) Pressure This function clears and resets the zero value on the display of measured (differential) pressure within 7%F.S. of the factory adjusted value.

OMR0032

Controller Set Up (P.42) and 14. Card Motor Controller Configuration software (P. 70) for instructions on how to setup. (7) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.50) and 14.5 Monitor/Test window (P. 80) for instructions on operating instruction of test operation 14 - 3.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

) (4.9) 1/8 (P, R port) Manual override (Pitch) P=16 21 Approx. 300 (Lead wire length) 4.5 L2 L1 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + 54.1 [61.1] 38.7 25.5 (Pitch) P=16 21 One-touch fitting (A port) Applicable tubing O.D.: 4,5/32" 7.5 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 49 49 49 49 P R P R P R P R 57.2 [59.4] 52.2 67 [69.2

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

Intrinsically Safe Valve

(A)4 2(B) (A)4 2(B) Locked position Number of solenoids Single 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) LOCK 2(B) (A)4 2(B) (A)4 Double PUSH (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) Caution How to Use Plug Connector When operating the locking type D with a screwdriver, turn it gently using a watchmakers screwdriver. [Torque: Less than 0.074 lbfft (0.1 Nm)] Caution 1.