MXQ

Solid State Switch: D-M9B, D-M9N, D-M9P, D-F9BW, D-F9NW, D-F9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 40 50 150 75 100 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MXQ8 26 2 2 6

Modular/F.R.L. Units Series AC

Note 8) Float type auto drain: The combination of C and D is not possible.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

MONOSASHI-KUN

D-F9H F7PW D-F7PW Reed Auto-Switch A80 D-A80 F79 D-F79 J79W D-J79W A72H D-A72H F7P D-F7P F7NWV D-F7NWV A73H D-A73H J79 D-J79 F7BWV D-F7BWV A76H D-A76H J79C D-J79C M9NA D-M9NA A80H D-A80H F7NV D-F7NV M9PA D-M9PA Water Resistant A73C D-A73C F7BV D-F7BV M9BA D-M9BA 2-Color A80C D-A80C F7PV D-F7PV M9NAV D-M9NAV Indication Type A79W D-A79W M9PAV D-M9PAV Solid State M9BAV D-M9BAV Auto Switch F7BA

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

D-B5, B6 20 to 100 D-G5, K5, G5W D-K59W 20 to 100 Hs Hs 24.5 24.5 B A B A Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-G5/K59 D-G5W/K59W D-B5 D-B64 D-A9 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-M9 D-M9W D-A9 Bore size Bore size A 41 40.5 42 39 46 44.5 A 31.5 31 32.5 29.5 36.5 35 48 47 A 37 36.5

Air Slide Table Series MXS

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 40 50 150 10 20 30 40 75 100 125 150 10 20 30 125 75 100 50 B MXS6 -0.4 -0.4 -0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 10 MXS8 4.9 -0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 51.9 26.9 11.6 MXS12 32.4 22.4 12.4 14.4 45.4 74.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 15.6 MXS16 32.7 22.7 12.7 12.7 42.7

New

D-DN

Environment

LEF D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction LEJ 3-wire 2-wire Wiring type NPN PNP Output type LEL 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage LEM 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Rated voltage DC specifications of type D and DO are only available with 12 and 24 VDC.

MXS Series Air Slide Table

22.7 17.7 14.7 12.7 4.7 90.7 82.7 42.7 34.7 65.7 57.7 4.7 9.7 22.9 6 119.6 111.6 36.6 16.6 28.6 26.6 21.6 18.6 16.6 8.6 92.6 84.6 35.6 27.6 63.6 55.6 8.6 13.6 27 6 96.5 104.5 41.5 21.5 33.5 31.5 24.5 23.5 21.5 13.5 89.5 81.5 40.5 32.5 56.5 48.5 13.5 16.5 : D-F9BW, D-F9NW, D-F9PW 2 color indication solid state switch: D-F9BWV, D-F9NWV, D-F9PWV Stroke B Stroke E Model Operating range A 40

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

MXS

70 75 80 GA 22 22 22 22 55 61 102 154 190 KA M 92 92 92 102 115 156 197 255 295 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 3.11-34 Air Slide Table Series MXS Auto Switch Mounting Position for Stroke End Detection Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100

End Lock Cylinder Series CBJ2

D-J79 D-C73C D-C80C D-H7C (16) D-F7V D-J79C (16) D-F7W D-J79W D-F7BAL D-F79F D-H7LF D-F7WV D-F7BAVL D-F7LF In addition to the models in the above table, the following auto switches are also applicable.

Tamper Proof and Flat Head Screw

SMC Pneumatics, Inc. 8 Series ASIII1F-T Dimensions (mm) 1in=25.4mm L4 D3 Applicable tubing O.D. d L3 D1 L2 M1 M1 D2 L1 Metric sizes Inch sizes Model d D1 D2 D3 L1 L2 L3 L4 M1 M1 Model d D1 D2 D3 L1 L2 L3 L4 AS1001F-01T 1/8" 8.4 38 4.5 26 AS1001F-23T 3.2 8.4 38 4.5 26 12.7 12.7 AS1001F-03T 5/32" 9.3 39.2 5.2 26.6 AS1001F-04T 4 10 4.5 0.7 9.3 39.2 5.2 26.6 10 4.5 0.7 AS1001F-05T 3/16" AS1001F

Low Profile Slide Table Series MXF

H G 5H9 depth 5 +0.030 0 33.5 6 5H9 +0.030 0 depth 5 (mm) N G H NN J M Z ZZ Model MXF20-30 4 29 30 4 57 91 91 104 MXF20-50 4 36 45 4 77 113 113 126 MXF20-75 6 40 45 6 125 162 162 175 MXF20-100 6 59 60 6 175 211 211 224 144 Low Profile Slide Table Series MXF Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E

CP95

D-Y59BL 2 pcs. 25 15 D-Y69BL 1 pcs. D-Y7PL Solid state switch CJ1 Auto switches are mounted on the same side but in different grooves of the cylinder.

CP95

D-Y59BL 2 pcs. 25 15 D-Y69BL 1 pcs. D-Y7PL Solid state switch CJ1 Auto switches are mounted on the same side but in different grooves of the cylinder.

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc.