5

863 901 939 977 1015 1211 1408 80 1229 1289 1350 1410 1470 1530 1591 1651 1711 2008 2305 RZQ 100 2070 2150 2231 2311 2391 2472 2552 2633 2713 3121 3529 Additional Weights (g) Bore size (mm) 32 40 50 63 80 100 Both ends tapped 6 6 6 19 45 45 Male rod end Male thread 26 27 53 53 120 175 Nut 17 17 32 32 49 116 With boss on head end 5 7 13 25 45 96 Foot (Including mounting bolt) 142 154 243 320

Compact 5-Port Solenoid Valve

ZK2 Combination Manifold n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 128 144 160 176 192 208 224 240 256 272 288 304 320 336 352 L2 85.5 101.5 117.5 133.5 149.5 165.5 181.5 197.5 213.5 229.5 245.5 261.5 277.5 293.5 309.5 L3 160.5 173 198 210.5 223 248 260.5 273 285.5 310.5 323 335.5 348 373 385.5 L4 150 162.5 187.5 200 212.5 237.5 250 262.5 275 300 312.5 325 337.5

44

Component materials have met apparatuses and containerpackages standards. ( ( 320 Stainless Steel 316 Insert Fittings KFG2 Series Variations Male Connector KFG2H Bulkhead Union KFG2E Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 KQ2 KQB2 KS KX KM KF Male Elbow KFG2L Union Elbow KFG2L Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 M H/DL L/LL KC KK KK130 DM Male Branch Tee KFG2T

HRL

Outputs 4 to 6 : Assigned for specified type of signals 320 Circulating Fluid Temperature Controller Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Touch panel p. 331 Improved usability and visibility To status screen To information screen To check operation time screen Menu screen Home screen To software version screen To home screen To temperature waveform

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2 [68.2] Approx. 300 (Lead wire length) Pg7 6 6 6 6 65.2 107 [111.4] 87.4 [91.8] 23.7 [25.9] 58.7 18.7 45.5 45.5 45.5 45.5 125.2 105.2 17 17 17 17 17 17 17 17 42.7 127 2.7 6 6 6 6 25.2 32.6 8.5 8.5 8.5 8.5 42.6 43.5 21.5 21.5 21.5 21.5 33.5 [35.7] Refer to page 375 for dimensions with connector cable. 320

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

.: 10, 3/8" L3 112 208 128 144 160 176 192 L4 11.5 13.5 16 14.5 12.5 17.5 15.5 24.2 (4.9) 51.9 (Light/surge voltage suppressor) (5.5) 43.8 34.5 19.1 9 stations 10 11 12 13 14 15 stations Stations L1 248 273 285.5 298 323 335.5 348 L2 237.5 337.5 262.5 275 287.5 312.5 325 R R + + + + + + L3 224 320 240 256 272 288 304 L4 12 14 16.5 14.5 13 17.5 15.5 16 stations 17 18 19 20 stations Stations

Compressed Air Preparation Filter

220 mm 490 mm Face-to-face dimension reduced by approx. 320 mm 170 mm AMG850 + AFF75B AFF90D For AFF90D 490 mm 170 mm 160 mm 220 mm The AFF series main line filter removes both water droplets and solid particles.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

Pressure gauge 4 1 NBR Cam handle assembly Seal 5 6 7 8 1 2 1 1 12377 12384 Siphon tube assembly Float switch 123712A IS410-1, 2 IS410-1, 2 1049 ALF400 to 900, ALT-5/-9 Series Dimensions: Auto Feed Lube ALF400 ALF800/900 Port size Port size D ALF500/600 Port size D Model Port size D A B C , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 239 247 296 320

Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed of range is from 20°/sec to 420°/sec , depending on the table accuracy (basic or high precision).  Series LER uses a worm gear and belt drive mechanism. ELECTRIC ACTUATOR. ELECTRIC ROTARY TABLE. 1.57000 lb. A30.

Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed of range is from 20°/sec to 420°/sec , depending on the table accuracy (basic or high precision).  Series LER uses a worm gear and belt drive mechanism. ELECTRIC ACTUATOR. ELECTRIC ROTARY TABLE. 1.40000 lb. A30.

Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed of range is from 20°/sec to 420°/sec , depending on the table accuracy (basic or high precision).  Series LER uses a worm gear and belt drive mechanism. ELECTRIC ACTUATOR. ELECTRIC ROTARY TABLE. 3.61000 lb. A30.

Rotation angle is possible up to 320 (310 on LER10).? Up?to 6.6 N?m of rotation torque (3.3 N?m of pushing torque available).? The rotation speed of range is from 20/sec to 420/sec , depending on the table accuracy (basic or high precision).?

Rotation angle is possible up to 320 (310 on LER10).? Up?to 6.6 N?m of rotation torque (3.3 N?m of pushing torque available).? The rotation speed of range is from 20/sec to 420/sec , depending on the table accuracy (basic or high precision).?

IP65 enclosure, Conforms to UL94V-0 flame resistance, Special construction improves service life when compared with current shading coil, Power consumption: size 1 - 4.5w; size 2 - 7w; size 3 - 10.5w, Body material: C37 (brass), stainless steel, DIRECT OPERATED 2 PORT VALVE (N.O.), 2 PORT VALVE, 320 lb

IP65 enclosure, Conforms to UL94V-0 flame resistance, Special construction improves service life when compared with current shading coil, Power consumption: size 1 - 4.5w; size 2 - 7w; size 3 - 10.5w, Body material: C37 (brass), stainless steel, DIRECT OPERATED 2 PORT VALVE (N.O.), 2 PORT VALVE, 320 lb

IP65 enclosure, Conforms to UL94V-0 flame resistance, Special construction improves service life when compared with current shading coil, Power consumption: size 1 - 4.5w; size 2 - 7w; size 3 - 10.5w, Body material: C37 (brass), stainless steel, DIRECT OPERATED 2 PORT VALVE (N.O.), 2 PORT VALVE, 320 lb

IP65 enclosure, Conforms to UL94V-0 flame resistance, Special construction improves service life when compared with current shading coil, Power consumption: size 1 - 4.5w; size 2 - 7w; size 3 - 10.5w, Body material: C37 (brass), stainless steel, DIRECT OPERATED 2 PORT VALVE (N.O.), 2 PORT VALVE, 320 lb

IP65 enclosure, Conforms to UL94V-0 flame resistance, Special construction improves service life when compared with current shading coil, Power consumption: size 1 - 4.5w; size 2 - 7w; size 3 - 10.5w, Body material: C37 (brass), stainless steel, DIRECT OPERATED 2 PORT VALVE (N.O.), 2 PORT VALVE, 320 lb

IP65 enclosure, Conforms to UL94V-0 flame resistance, Special construction improves service life when compared with current shading coil, Power consumption: size 1 - 4.5w; size 2 - 7w; size 3 - 10.5w, Body material: C37 (brass), stainless steel, DIRECT OPERATED 2 PORT VALVE (N.O.), 2 PORT VALVE, 320 lb

IP65 enclosure, Conforms to UL94V-0 flame resistance, Special construction improves service life when compared with current shading coil, Power consumption: size 1 - 4.5w; size 2 - 7w; size 3 - 10.5w, Body material: C37 (brass), stainless steel, DIRECT OPERATED 2 PORT VALVE (N.O.), 2 PORT VALVE, 320 lb