JA/JAH/JB/JS

32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMA-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

Compact

0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1 0.10 ST 15, 20 ST 15, 20 0.15 0.10 ST 5, 10 0.05 0.05 ST 5, 10 ST 5, 10

OMR0031

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

CNG

Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-5-6 7 Model Selection Series CNG Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 200 200 100 100 40 30 40 50 30 40 50 32 Load weight: m (kg) 40 25 Load weight: m (kg) CL 20 20 20 32 CL1 10 10 25 20 MLGC 5 4 3 5 4 3

Rubber seal 5 Port Solenoid Valve Series SYJ7000

SYJ7000-22-1 SYJ7000-22-2 V111(T)No. 1 2 3 4 5 6 Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate 7 8 Pilot valve How to Order Pilot Valve Assembly V111 5 G V115 5 D Rated voltage Coil specifications Light/surge voltage suppressor 5 6 1 2 24 VDC 12 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 V AC 50/60 Hz] 220 VAC

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

the right. 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) F1 F1 F1 12-5-20 21 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Construction !

Vacuum Pad

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

SFOD-OMT0009CN

5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111 No.SFOD-OMT0009CN-B Revision

Industrial Filters

0.5, 1, 5, 10 20, 50, 75, 100 EH EB ES Plating fluids, General acids, Alkali fluids, Industrial water, Cooling water Polypropylene 0.5, 1, 5, 10 20, 50, 75, 100 EHM P.41 General acids, High-temperature fluids EHK Glass fiber 1, 5, 10, 20 Paper P.42 Cotton, Phenol impregnated, (Epoxy adhesion) 5, 10, 20 Hydraulic oil, Lubricating oil, Fuel oil EP Micromesh Stainless steel 304 (Epoxy adhesion

33

1) C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2

53

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

5 Port Air Operated Valve Series SYA3000/5000/7000 1

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Cylinder with Lock Series CLS

Max. load current or current range (mA) None 5 to 50 5 to 50 5 to 25 5 to 12.5 20 50 25 12.5 30 D-A53 PLC 24VDC 24VDC 100VAC 200VAC 4 to 8VDC 24VAC/DC or less 100VAC 200VAC Max. 24VDC D-A54 Relay, PLC None IC circuit D-A56 None D-A64 Relay, PLC D-A67 None None (2 color indication) IC circuit, PLC D-A59W 5 to 40 24VDC Relay, PLC 5 to 50 5 to 50 5 to 25 5 to 12.5 50 40 20 5 to 40 5

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

MHZ2/MHZJ2

External gripping force Internal gripping force MHZ 2-10D MHZ 2-10D Pressure 0.7MPa 25 20 0.6MPa 20 Pressure 0.7MPa 15 0.5MPa MHZ2/Standard MHZJ2/With dust cover Gripping force N Gripping force N 0.6MPa 0.5MPa 0.4MPa 0.3MPa 0.2MPa 15 0.4MPa 10 0.3MPa 10 0.2MPa 5 5 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm F F F F MHZ 2-16D MHZ 2-16D Pressure 0.7MPa 60 1N

48

Operating Range Auto Switch Mounting Example Part no.: JMGPM20-45 A 5 mm width spacer is installed in the JMGPM20-50.