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Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20m bundle 100m bundle Symbol 20 100 2 1 1m = 3.28ft Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 1MPa = 145 psi F = (1.8 x C) + 32 14 Related

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20m bundle 100m bundle 2 1 Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 11 Related Equipment Clean Series Tubing Polyurethane

800) 258-9200-www.stevenengineering.com 5.5 5.5 5.5 6.5 1 pc. 2 pcs. 20 20 20 20 20 20 CNA The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

C D E F K L T N J G H JAHL40-16-150 JAHL50-20-150 JAHL63-24-150 JAHL80-30-150 JAHL100-39-150 JAHL100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 70 80 88 96 116 116 28 35 38 45 55 55 50 59.5 66 79 96 96 42 48 54 60 74 74 36 44 48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 53 65 56 67.5 78 78 1.09 2.03

Stroke length tolerance Flange Mounting CE2 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Weight Rod end configuration 2020 0.41

Stroke length tolerance Flange Mounting CE2 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Rod end configuration Weight 2020 0.41

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

1/8" 10 PA PB (270) 249 AIR SUP Rc, NPT, G 1/4" FLUID OUT Rc, NPT, G 3/4" 195 166 157 82 110 51 18 FLUID IN Rc, NPT, G 3/4" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) Tube extension: PAF5410P19 P19N P19F 204 10 255 120 4 x 9 (270) 249 43 AIR SUP Rc, NPT, G 1/4" 10 Reset button Air operated reset port Rc, NPT, G 1/8" (19.05) (15.85) FLUID OUT 3/4" tube extension Straight part 40 82

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

VQD 24V 12V 100V 200V 110V 220V 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 To remove manifold from DIN rail: 1) Loosen the clamp screw on the A side of both ends of the manifold. 2) Lift the A side of the manifold off the DIN rail and slide it in the direction of the B side.

The electrical entry port {VQ1000: G 1/2, VQ2000: G 3/4} permits connection of conduit fittings.

20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F D-F7W D-J79W D-F7BAL D-F79F D-F9BAL 6 6 6 6.5 Number of auto switch D-F7LF D-A9 D-F9 D-A79W 7.5 7.5 8 D-F7LF 7.5 D-F9, F9V D-F9W, F9WV D-F9BAL 1 pc. 2 pcs. 20 20 20 20 25 25 20 20 5.5 5.5 5.5 6.5 The operating ranges are provided as guidelines including hystereses and are not guaranteed

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

Bore size: 16, 20 E S 4-O counterbore 2-N through MK(2) X F Stroke Q 2-P Y RS Q G RS H A G D T RZQ U W V L M MI W S 10 (11) 20 (22) H + Stroke B + Stroke A + 2 stroke Workpiece transfer direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore CC

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

LEC Y Motorless Motorless Grease pack order number: GR-S-010 (10 g)/GR-S-020 (20 g) LAT LZ LC3F2 885

Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 6 Standard (shock absorber RB series) 10, 15 20 25 32, 40 Magnetic holding force Refer to page 1517 for specifications.

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.