MTS

8-10-16 16 Precision Cylinder Series MTS Dimensions: 20 MTS20 Basic style 49.5 47 11 8.5 2-cushion needle Width across flats 8 4.5 4.5 Rod cross section 6 4.5 MX 2-M5 x 0.8 (Port size) MTS MY 5.5H7 +0.012 0 10h7 0 0.015 16 0.2 24 0.2 4-M5 x 0.8, effective length 8 14 15 4-4.5 through 2 x 4-7.5, counterbore depth 4.5 (Opposite side also) 4 CY 28 0.2 38 28 0.2 MG 36 Courtesy of Steven Engineering

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

16 16 16 16 16 15 21 21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Flat ribbon cable connector SOL.A () (+) 20 1 station SOL.B () 18 (+) SOL.A 20 19 () 16 (+) 2 stations SOL.B 18 17 () 14 (+) 16 15 SOL.A 12 () (+) 3 stations 14 13 SOL.B () (+) 10 12 11 SOL.A 8 () (+) 10 9 4 stations SOL.B () 6 (+) 8 7 Connector terminal no.

Flow Control Equipment

of needle rotations has been increased (8 to 10 turns) 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/16" 3/8" 20 100 180 230 260 390 460 660 790 920 1580 1710 Air (l/min(ANR)) Controlled (Free) flow The increased number of needle rotations (8 to 10 turns) permits easier control at lower speed. 0.3 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Eff. area (mm2) Notes) Supply pressure: 0.5MPa, Temperature

HRL

Users system side To the thermo-chiller 24 VDC +24 VDC (Output) 1 2 +24 VDC (Input) EXT 24 VDC EXT 24 COM Power supply 14 24 COM (Output) 24 COM Run/Stop When using a user s power supply, connect the 24 VDC + side to pin 2 and the COM side of each contact input signal to the users power COM. 3 4.7 k External switch 16 4.7 k Operation mode request (Momentary) 4 4.7 k 24 VDC 6 Power supply

HRX-OM-R005

MPaPSI 5.14 13 Setting of alarm buzzer Alarm sound can be set to on/off. 5.15 14 Alarm customizing Operation during alarm condition and threshold values can be changed depending on the alarm type. 5.16 15 Data reset Functions can be reset to the default settings (settings when shipped from the factory). 5.17 16 Accumulation time reset Reset function when the pump, the fan, or the compressor

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

MXW Series Long Stroke Slide Table

19 8 7 9 20 12 13 11 14 Parts List Note Material No.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 135 139 156 156 190 190 up to 500 up

AC Servo Motor Driver (CC-Link Type)

Monitor data 1 lower 16 bit (RWrn) : Lower 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 1 upper 16 bit (RWrn+1) : Upper 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 2 lower 16 bit (RWrn+5) : Lower 16 bits of data demanded by Monitor 2 (RWwn+1) Monitor data 2 upper 16 bit (RWrn+6) : Upper 16 bits of data demanded by Monitor 2 (RWwn+1) A sign is set if data does not

AC Servo Motor Driver (CC-Link Type)

Monitor data 1 lower 16 bit (RWrn) : Lower 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 1 upper 16 bit (RWrn+1) : Upper 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 2 lower 16 bit (RWrn+5) : Lower 16 bits of data demanded by Monitor 2 (RWwn+1) Monitor data 2 upper 16 bit (RWrn+6) : Upper 16 bits of data demanded by Monitor 2 (RWwn+1) A sign is set if data does not

MQQ

11.5 12 22.5 11 25 19.6 M10 x 1.25 6 33.5 17 28 14 16 16 28.5 12 28 25.4 M14 x 1.5 8 40.5 22 Applicable bore (mm) Part no.

MQQ

end nut H1 Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 28 40.5 22.5 M14 x 1.5 28.5 For details about the rod end thread adapter and rod end nut, refer to page 10-5-16. 10-5-14 14 Compact Low Friction Cylinder Metal Seal Series MQQ Foot style: MQQLL 10, 16, 20 Bore

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

, 90+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 15+55 1.26 (1.30) 1.81 (1.86) 2.79 (2.84) 4.93 (5.08) 6.79 (6.99) n=2, 4, 6, 8, Flange 2 (Dif. / same side(s)) Standard weight 90 100 110 120 20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16,

ZP3

Form w 1 Material C 04 4 4.5 1.2 7 6 0.5 06 6 6.5 N S U F GN GS HS A 0.8 08 8 8.5 10 10 11 9 7 1 13 13 14 1.2 16 16 17 B ZP3 (10 to 16) (4 to 8) UM 2 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 4 to 16 w q ZP3 T N 04 A5

Wedge Cam Operation Provides

hold: 14 Internal hold: 16 11 9 20 104 MHW2 External hold: 27 Internal hold: 30 External hold: 45 Internal hold: 53 External hold: 79 Internal hold: 90 MHKL2-16D 16 14 14.6 28.6 164 Double acting MRHQ MHKL2-20D 20 18 16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

18 Rc 1/8 6.2 14 ZF 15.5 12.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT25F-B8 25 28 M8 x 1.25 8 12 ZP 36 ZPT25F-B01 40 50 8 01 Rc 1/8 6.2 14 ZPT F-B (Without buffer/Female thread) ZPT32F-B5 32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

Electric Actuator Triple Axis P&P Unit

5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 13 Electric Actuator/Maintenance Guide 1 Be sure to read before handling.