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= 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 = 0.5 MPa Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa.

Note 4) Interface regulator is only capable of regulating the P port pressure. 0.06 1.9 2.1 4.5 4.5 P A P B A EA B EB Effective area at supply side (mm2) (3) S at P1 = 0.7 MPa, P2 = 0.5 MPa Effective area at exhaust side (mm2) (3) S at P2 = 0.5 MPa How to Order Solenoid Assembly Non plug-in type C DXT170 5 L Flow Characteristics {1(P) 4(A)} Conditions: Inlet pressure setting 0.7 MPa

(inch) Connection thread UNF NPT H (Width across flats) Min. port size D1 Note) D2 L1 P2 A Weight (g) Model L2 M P1 L3 1 8 1 8 5 32 3 16 KQ2ZD01-34S KQ2ZD03-34S KQ2ZD05-34S KQ2ZD07-34S KQ2ZD07-35S KQ2ZD07-36S KQ2ZD09-35S KQ2ZD09-36S KQ2ZD09-37S KQ2ZD11-35S KQ2ZD11-36S KQ2ZD11-37S KQ2ZD13-36S KQ2ZD13-37S 14.29 14.29 14.29 9.6 10.4 11.4 37 37 37 37.5 38.5 40.5 45 45.5 47.5 52 52.5 54 60.5

PRESSURE OUT How to Set Value To enter a value such as the one for pressure setting: Window comparator mode In this mode, P2 and the current set value are displayed alternately after setting P1. Press the SET button to display the next set value ( : hysteresis). Press the UP or DOWN button to change the value. (Refer to "How to Set Value" at right.) 1.

K= 2 (Coefficient) [Example 2] Moment of Inertia: 5 x 10-5 kgm2 Rotation time: 0.1s/90 To select model MRHQ16 It cannot be used because the point of intersection P2 on the graph is outside the limiting range. (Review is necessary.) To confirm by calculation, use formula (1) on the right and check kinetic energy of load: E will be within the allowable value below.

) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT 3/8", 1/2" 8 190 30 14 110 AIR SUP. 84 81 AIR E x H. 67 13 30 26 10 FLUID IN 3/8", 1/2" EXH (P2) Rc, G, NPT, NPTF 1/4

F2 results lrom the secondary pressure (P2) acting on the end face of the spool.

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 20 For Air Digital Flow Switch Series PFA How to order PFW3 0 0 A Remote Type Display Unit Unit specification Flow rate range Nil M With unit switching function Fixed SI unit Note) 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 1 0

217.5psi) Maximum operating pressure 1.0MPa (145psi) Regulating pressure range 0.05 to 0.85MPa (7 to 120psi) Fluid Air 5 to 60C (with no freezing) (23 to 140F) Ambient and fluid temperature M5 x 0.8 (10-32 nominal) Pressure gauge port size Weight (kg) 0.79 (1.7lb) 0.74 (1.6lb) 0.78 (1.7lb) 0.73 (1.6lb) 0.79 (1.7lb) 0.74 (1.6lb) Supply side effective area (mm) when P1 = 0.7MPa (101.5psi), P2

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

Q=14.2Cv 10.2 P l/min G Formula based on effective area (Smm) Q=0.8S 10.2P l/min G Other : Flow rate (l/min) : Pressure differential (P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor : Fluid specific gravity (water = 1) Q P P1 P2 S Cv G 1. Materials FKM: Fluoro rubber Trade names: Viton, Dai-el, etc. 2.

-10+10 5 -8No.PS-OMF0005CN-E * DIN (B ) DIN No. 1 2 DIN +(-) -(+) 612mm 0.50.6Nm (612) 0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

2 SOL.ASOL.B 1 DC24V 2 9 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 3 3 3 3 DIN DIN DIN DIN / / / / 01T 01T 01T 01T DIN (A B AB) COM 1.25-3.5M1.25Y-3L1.25-3M VFR3000 AB+ B+COM -COM 90 O 1) 0.9MPa 2) 3) MAX.50 4) 2 5) P 3 AB ARBF3000 P AB ARBF3050 A B P 1.0MPa 1) 0.10.83MPa 2 -560 () 3) Rc 1/8 (kg) 0.46 mm2) A 21 18.5 11 P1=0.7MPa,P2

N.O. 9 VFR5000-OMN0001 VFR5000 Series/ DIN / 01T DIN 180 (A B AB ) COM ARBF5050 A B P 1.0MPa 1) 1.25-3.5M1.25Y-3L1.25-3M VFR5000 A-B+B+COM -COM AB+ B0.1~0.83MPa 2) VFR5100 A COM 5~60 () 3) VFR5200 A COM B Rc1/8 3 (kg) 0.83 A COM B VFR5 400 PA 44 38 32 (mm2) P1=0.7MPa;P2=0.5MPa S PB 38 40 31 5 AEA 90 (mm2) P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000

(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000