SMC Corporation of America
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(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

IDG 10 M 03 X016 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard 10 Flow direction (rightleft) With dew point indicator R S 20 Standard equipment 30 50 Drain discharge symbol Standard dew point Size 3 10 20 30 50 5 Drain discharge method Nil Manual valve C N.C. auto drain D N.O. auto drain Drain guide (aperture 1/4, without valve) J Port size Note) IDG50M

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

58 63 1 68 J 73J 83 , 66 71 76 81 1 91 i 10 . . " ISore size A' ~i I D O'( A B e GA GB K MM CX E NN CK CU OC~ CH ' ,o j ' 1 Cr H I J (mni) .~ , ~ 6 7 9 14 16.5 3 1 0.5 11 M3 XO .S M10 X 1.0 6 17 , 6 18.5 20.4 3 16 4 12 1.6 18 3.4 8 26 ~-13 ( 10 10 20 5 M4XO.7 MlaXl.0 6.5 1.6 24 6 I 17 8 20,5 1 239 4.5 20 I 7 33 R l l~ . 5 L29 13.5. 12 24.5 6 15.5 6 18.5 M5 XO .8 M14 X 1.0 17 2.9 42 14 I

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

) Ambient and fluid temperature With auto switch: 10 to 60C (No freezing) Lubrication Not required (Non-lube) CJP Clevis integrated Thread tolerance JIS Class 2 CJ2 +1.4 0 mm Stroke length tolerance Piston speed 50 to 750 mm/s CM2 Cushion Rubber bumper Allowable kinetic energy 0.27 J 0.4 J 0.65 J 1.2 J JIS Symbol Double acting, Single rod CG1 Courtesy of Steven Engineering, Inc.-230 Ryan

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

+0 052 0 Depth 1.5 M5 X 0.8 (Finger closing port) M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) G 65 28.2 4-M6 X 1 H (Piston rod and rack screw) 6.5 1 11 15 10 24 14 Width across flats 10 20 46 24 (4 locations) A (70) 30 24 24 10 30 12.5 12.5 Closed E 54 Open F 17 17 4-M6 X 1 through (Thread for mounting attachment) A B C D E F G H 54 96 116 J 120 195 235 Model

Size 3 10 20 30 50 5 Drain discharge Nil Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide (Aperture 1/4, without valve) J Port size Note) IDG50M and 50HM are 03 only.

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .

(Thread for mounting attachment) (mm) J 120 195 235 Note 1) J dimension is at fully closed.

10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .