MK

29 B 6.5 7 11 14 17 20 A 26 26.5 30 21 25.5 26 B 3.5 4 8 11 14 17 A 19.5 24 24.5 B 9.5 12.5 15.5 A 31.5 22.5 27 27.5 B 9.5 12.5 15.5 18.5 A 35.5 26.5 31 31.5 B 13.5 16.5 19.5 22.5 MK220 MK225 MK232 MK240 MK250 MK263 Auto Switch Mounting Bracket Part No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z + Stroke ZZ + Stroke 6-5-53 54 Series CG1Q With Mounting Bracket Clevis style: CG1DQ Clevis Style 20 to 63 Bore size (mm) Stroke range (mm) CD CX CZ B L RR V TE TF TH CD hole H10 Axis d9 20 25 32 40 50 63 80 100 Up to 200 38 45.5 54 63.5 79 96 99.5 120 28 32 29 33 40 49 60 74 56 64 14 16 20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 8 10 12 14 16 18 18 22 5.5 5.5 6.6

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

B B B B 3.2 31.2 P R (4.4) 32 15.3 7.5 17 16 A A A A A 1 (Station n) (Station 1) L1 L2 4.5 (Pitch) P = 10.5 (Light/surge voltage suppressor) 15.5 15.5 (Station n) (Station 1) + + (Light/surge voltage suppressor) A A 20 15 5 48.5[55.5] B B + + 1.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" (Pitch) P = 10.5 16 33.1 A A 20 15 B B 5 1 (Pitch) P = 10.5 16.5 M5 x 0.8 (A,

V

R E SY3/5/7000 SS5Y 20 T H R E A D T Y P E PT 00T NPTF M A N I F O L D S E R I E S V A LV E S TAT I O N S 3 SY3000 5 SY5000 7 SY7000 02 2 Stations to 20 20 Stations H O W T O O R D E R B O D Y P O R T E D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

IDU/IDF

IDU3D, 4D, IDF1D to 4D 25 Terminal board W: Water cooled condenser (IDF37C1 to 240D) Model IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D 74 Condenser type Shell & coil system B 247 298 123 123 173 197 A 24 20 47 55 37 45 Model IDU3D IDU4D IDF1D IDF2D IDF3D IDF4D Cooling water flow l/min Note1) 6 8 20 50 65 80 90 A 53 Cooling tower capacity RT Note 2) 2 2 3 5 7.5 7.5 7.5 B Water flow

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

Microspeed Cylinder

B Through hole/ Double end tap common (standard) Number of auto switches Bore size 12 16 20 25 2 pcs. 1 pc.

OMU0023

The Direct Operation is performed according to the parameters set in Step Data No. 20. (b) The Direct Operation starts when the register value of address D9100 is changed from "0h" to "0100h".

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

fitting (A, B port) 20 15 B B 5 1.5 2n-M5 0.8 (A, B port) (Pitch) P=10.5 15.7 Other dimensions are the same as the M5T.

Basic Type/Direct Mount Type

7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

has an effective area approximately 20% smaller.

HRX-OM-X084

Model number: HRR010-AN/WN-10/20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR010-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

AC Servo Motor Driver (Pulse input type/Positioning type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial value Recommended Value Parameter *1,*2 Para No Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3. PA06 1 100 (Positioning mode: 10) Electronic gear denominator *3.

Industrial Filters

Models (mm) Internal volume (L) Number of arranged elements Weight (kg) Element length (L) Model N (Port size) G W A B C D E F H J K P 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 250 20 70 15 330 216.3 230 490 660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4

Applicable Auto Switch Model

(RedGreenRed) CDJ2, CDVJ3, 5 10, 16 CDQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 CDlXW Plate mounted(P), 10, 16, 20, 25, 32, Housing mounted(B), 16, 20, 25, 32 CDY1S, CY1L 6, 10, 15, 20, 25, 32, 40 RSDQ 20, 25, 32, 40, 50 MDU 25, 32, 40, 50, 63 CE1 12, 20, 32, 40, 50, 63 MK, MK2 20, 25, 32, 40, 50, 63 CXT 32, 40 Specifications PLC: Programmable Logic Controller D-F7lW/D-J79W

HRS100/150

HRS 100/150 HRS 100/150 Applicable model Dimension [mm] A B C HRS100/150-A-20/40-A 830 302 1552 HRS100/150-W-20/40-A 570 401 1353 C HRSH 090 HRSH 118 HRSE A B Option symbol With Earth Leakage Breaker B HRZ HRZD HRS 20 B With earth leakage breaker HRW A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.