High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Electric Actuators

24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Rotary Actuator/Vane Type

CRA1 [mm] Size [mm] Applicable shaft type: J CRQ2 CRB2, CRBU2 15 20 30 40 K T K T K T K T CRB2, CRBU2 Equal dimensions are indicated by the same marker. Size Applicable shaft type: K, T Shaft type 15 20 30 40 MSQ Equal dimensions are indicated by the same marker.

Table of Contents

AC DC 60 40 1 99 60 120 183 Application Example Maximum 40 N.C. (VX31) N.O. (VX31) C.O.

Table of Contents

SB, counterbore depth SC P .C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) I G 63 84 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 M 4 6 B 134 166 K 15 21 AC 6 8 J 38 52 AA 96 122 AB 90 114 NA 34 40 L +0.036 0 +0.036 0 NB Model MHS3-100D MHS3-125D CB 30.6

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Table of Contents

(mm) 3.2 4 6 Effective area (mm2) Nylon (1) (2) 3-applicable tubing Weight (g) D Model D L Q M Urethane 2.9 4.4 10.6 KQ2T23-00 KQ2T04-00 KQ2T06-00 5 7 10 9.6 10.4 12.8 3.4 6.4 13.4 17.5 18 20 4.3 4.5 5.3 15.5 16 17 D D 8 KQ2T08-00 15.2 23 6 18.5 25.6 17.7 15 10 KQ2T10-00 18.5 26.5 6.8 21 40 28.4 25 12 KQ2T12-00 20.9 28.5 7.5 22 57.4 45.4 29 K 16 KQ2T16-00 26.5 34 10 25 100 (84) 40 Note 1)

Table of Contents

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Table of Contents

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Table of Contents

-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (

Modular F.R.L. Unit

Min. clearance for maintenance 25 A AFD30, 40, 40-06 L Bracket (accessory) D A G F K M J C 40 B E IN OUT H OUT Port size P Drain Min. clearance for maintenance With compact auto drain (N.C.)

5

WA B C B1 REC A K N Smooth Smooth ZZ + Stroke S + Stroke N F M H Low Speed (mm) MQ Bore size (mm) A AL B B1 C D E F G H H1 J K KA RHC 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 50 35 32 70 27 52 20 40 10 17 58 11 M8 x 1.25 7 18 63 35 32 85 27 64 20 40 10 17 58 11 M10 x 1.25 7 18 80 40 37 102 32 78 25 52 14 21 71 13 M12 x 1.75 10 22 100 40 37 116 41 92 30 52 14 21 72 16 M12 x 1.75

JIS Standard Hydraulic Cylinder

x 0.8 K B +0.1 0 40 31.5 145 115 45 60 M24 x 1.5 40 30 M6 x 1.0 C-series A CHS +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 30 M6 x 1.0 +0.1 0 50 40 185 145 57 79 M39 x 1.5 63 40 M8 x 1.25 CH2 CH2 Double knuckle joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) Size Q1 = M Size 15 20 30 40 Q1 = M 15 20 30 40 Shaft type K T K T K T K T Thread Thread M3 x 0.5 2.5 2.5 2.5 2.5 M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = L1 M4 x 0.7 3.3 3.3 3.3 M4 x 0.7 3.3 3.3 3.3 L1 M5 x 0.8 4.2 4.2 M5 x 0.8 Q1 4.2 4.2 Q1 Symbol: A53 Shorten both long and short shafts. Applicable shaft type: K Symbol: A50 Shorten both long and short shafts.

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.