Thermo-chiller

With functions narrowed down, 2 independent temperature control systems have been achieved with only a single compressor , a single pump , and a single tank .

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Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) (Accessory)* Rc1 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc1/4 6 Pressure gauge 0 to 1 MPa 7 Y-strainer (#40) or filter Rc1/2 8 Valve Rc3/8 9 Y-strainer (#40) or filter Rc3/8 * If foreign objects of 20 m or larger may enter, install a particle filter separately.

CHKD/CHKG

D-M9/M9V D-M9W/M9WV D-M9A/M9AV Bore size (mm) D-A9/A9V D-Z7/Z80 A 12 13 15 17 18 21.5 23.5 31.5 B 19 20 21.5 23.5 27.5 31 40 49.5 B 16.5 18.5 22.5 26 35 44.5 B 15 16 17.5 19.5 27 36 45.5 B 16.5 18.5 22.5 26 35 44.5 A 10 12 13 16.5 18.5 26.5 A 8 9 11 13 17.5 19.5 27.5 A 10 12 13 16.5 18.5 26.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

Fieldbus System

L4 5.5 L7 28 L6 8 26 47 Communication connector 1.5 P = 10.5 1.5 Indicator light 85 (12) Marker groove Manual override Power connector B A B A B A B A B A A A 93.5 106 8 90 71 66 75 (51.8) (40) (5.5) (35) 2 Valve Plate 17.5 FE terminal 4 x M4 mounting hole Connector for Handheld Terminal Output connector SI Unit 2 x M4 mounting hole Digital Input Unit L3 L5 End Plate Input connector Digital

Series VQ Base Mounted Metal Seal/Rubber Seal

A B A B A Void A Void A B A B A B A A A B Double Double Double Double Double SY Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VK VZ ADDRESS NO. STATION NO.

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

114 186 340 405 485 660 870 20 40 60 30 60 10 40 60 L1 16 40 L2 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20

VZS

plug connector With lead wire KZN: K plug connector Without lead wire KZO: K plug connector Without connector 3 position double check 6 How to Order Pilot Valve Assembly How to Order Light Cover Assembly Plug-in type K plug connector Light cover assembly 1 A 5 SCZS2 2 A 1 L AXT171-2 FZ Pilot valve assembly Series VZS2000 VZS2000 Light cover assembly Coil rated voltage Pilot valve manual override

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

VQ5000

VQ550 Indicator light Indicator light 214 121.8 195 (200.5) 91.5 59.5 105.8 (Port A) 17.5 13.5 (Port B ) 2 2 73 (78.5) 122 106 59.5 (Port A) 17.5 13.5 (Port B) 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 66 40 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole G1/2 Electrical entry 18 31.5 37 41 50 98 G1/2 Electrical

PF-OMN0009_C

N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -13No.PF-OMN0009CN-F FLOW POWER (OUT ) M8 1 DC+ (4 ) () 2 NC/ () () 3 DC() 4 (IN ) () M8 IN OUT POWER FLOW POWER FLOW -14No.PF-OMN0009CN-F

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0 1 3-position double check: VQ5600 1 Indicator light Indicator light 2 194.8 (200.3) 2 213.5 73 (78.5) 121.8 91.7 59.5 105.8 121.8 105.8 59.5 13.5 2(B) port 4 (A) port 17.5 (A port)17.5 13.5 (B port) SMC 2 4 2 4 SMC A B A B 40 53 66 162 50 41 37 31.5 18 66 53 40 A B A B 1 3 5 14 12 14 5 1 3 12 35 53 2 x 6.5 Mounting hole 35 53 2 x 6.5 Mounting hole Manual override Manual override 31.5 37

Compact Cylinder

Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8

CS1

Wiper ring Piston seal Valve seal Tube gasket Holder gasket Rod seal 125 CS1H125A-PS SDR-36 P7 C120 G55 RPS-125 SKY-36 140 CS1H140A-PS SDR-36 P7 C135 G55 RPS-140 SKY-36 160 CS1H160A-PS SDR-40 P7 C155 G55 RPS-160 SKY-40 1.10-6 Series CS1 Basic/CS1B Lube (CS1B), Non-lube (CS1BN), Air-hydro (CS1BH) With auto switch/CDS1B (mm) Stroke range (mm) Bore (mm) Style M KA K MM EA C D E B A AL J G FA

Shock Absorbers and Rate Controls

(illodel) al D l H t wt wl 0E .tfit(B) 2.25 2.63 MlO x 1,0 .t2 N/A 0.34 1.95 .34 .40 /A l.t/A l{/A 0EII.r tm(B) 3.22 3.6r Ml2 x 1,0 t3 N/A 0.34 2.81 .43 .56 N/A .43 .38 (r.R)0rxr.25(Bl 3.22 3.59 y2.?

Title not found

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

Proposals for Energy Saving

Content 40 50 63 MGZ40R-PS MGZ50R-PS MGZ63R-PS A set of above nos. 29, 34, 35, 36, 37, 38, 39 and 40. Seal kits consist of a set of items 29 and 34 through 40, which can be ordered using the seal kit number for each bore size. 12 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Actuator Series MGF 40, 63, 100 Guide Table Compact type with reduced height.

Air Cylinder CP Series Cylinder Positioner Assembly

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

MXW Series Long Stroke Slide Table

Dimensions MXW 20 Stoke: 150, 175, 200, 225, 250 (mm) Operating port 2-Rc (PT) 1/8 Width across hexagon socket hole 4 J 20 Scale: 20% 10 Width across flats 13 8-M5 x 0.8 thread depth 13 (Helisert) 6H9 +0.03 depth 5.5 6H9 +0.03 depth 5.5 0 0 7 72 98 48 Y Y 25 160 40 40 40 L 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N-1) x H G Bottom through hole 5.1 GG HH H 7 depth 5.5 6H9 +0.03