Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

MY2HT40 MY2HT40 MY2HT40 40 40 40 CX 30 30 30 MY2HT25 D20 20 MY2HT25 MY2HT25 20 -X MY2HT16 2010 10 10 MY2HT16 MY2HT16 8 8 8 Data 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40

0.5

IZF 21 IZF 31 Rapid static neutralization Installation distance and discharge time (Discharge time from 1000 V to 100 V) IZF21 IZF31 20 20 IZF21 IZF21 IZF31 IZF31 20 20 20 20 15 15 Discharge time [s] Discharge time [s] 15 15 15 15 Air flow level: 1 Discharge time [s] Discharge time [s] Discharge time [s] Discharge time [s] Air flow level: 1 Air flow level: 1 Air flow level: 1 10 10 Air flow

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Thermo-chiller/Rack Mount Type

Part number Applicable model A dimension [mm] Weight [kg] HRR010-m-20-mUY 330 HRR012/018-m-10-mUY 417 HRR012/018-m-20-mY HRR024/030-m-20-mY 506 HRR050-A-20-mUY 815 HRR050-W-20-mUY 637 HRR-KS001 Approx. 7 83 mm A Adjuster foot Caster (O.D.: 63) 303 mm 372 mm 494 mm 428 mm 544 mm Mounting view (HRR012/018-A) Anti-quake bracket A Anti-quake bracket B Hexagon nut Hexagon bolt Caster adjuster-foot

LVQ

T) View Z (mm) Dimensions A B C D M N S T U V Model LVQ20-S-3 LVQ30-S-3 LVQ40-S-3 LVQ50-S-3 LVQ60-S-3 25.5 46 31.5 58 7 15 83 35.3 10.6 7 23.5 47 29.5 59 7 15 113.5 36.9 16.5 10 23.5 47 29.5 59 7 20 119 37.9 22 35 70 41 82 7 20 171.5 64 25 17 35 70 41 82 7 20 182.5 66 32 With indicator, High back pressure spec. with indicator N.C. valve Dimensions (mm) S Model LVQ20-S-4 LVQ30-S-4 LVQ40-

PF2A/PF2W

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (43.5) A A B Output specifications 63 Pulse output only 77 73 Pulse output + Analog output 87 Flow direction Analog output 1 to 5 VDC 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 0 0 Min. measured flow rate value Max. measured flow rate value Real-time flow

HRS100/150

HRS100-A/W-20/40, HRS150-A/W-40 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 123 HRS100/150 Series Specific Product Precautions 5 Be sure to read this before handling

7

VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5)

REC

15.5 34 13 26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

are vertical upward mounting with a speed of 500 mm/s, use graph (2).

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

OMU0023

Step Data setting Note 2, 3) 06h / 10h Setting of a single or all Step Data parameter(s) Direct Operation Step Data reading 03h Reading of Direct Operation Step Data parameters. Direct Operation Step Data setting 06h / 10h Setting of a single or all Direct Operation Step Data parameter(s).

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

(800) 258-9200-www.stevenengineering.com 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377) RZQ MI W S CEP1 Stable operation possible even at a low speed of 5 mm/s (Measurement based on JIS B 8377) Sliding resistance Bi-directional low-friction operation possible.

Digital Flow Switch

(Default setting: 0 s) 0.00 s 0.05 to 0.1 s (increment of 0.01 s) 0.1 to 1.0 s (increment of 0.1 s) 1 to 10 s (increment of 1 s) 20 s 30 s 40 s 50 s 60 s Setting of security code The user can select whether a security code must be entered to release the key lock. At a time of shipment from the factory, it is set such that a security code is not required.

o

,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \

o

,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \

MNB

B2 H + Stroke A K AL A S + Stroke H Width across flats B1 ?? ??

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \

Support Guide/11-LEFG Series

58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600 11-LEFG25-S-600 730 607 710 11-LEFG25-S-150 280 157 260 11-LEFG25-S-200 330 207