2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

Modular F.R.L. Unit

Description Symbol Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S]

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Flow Control Equipment

Applicable cylinder bore (mm) 4 6 8 10 12 Construction M5 X 0.8 6, 10, 16, 20 AS12l1-M5 1 8 R(PT) 20, 25, 32 AS22l1-01 1 4 R(PT) 20, 25, 32, 40 AS22l1-02 3 8 R(PT) 40, 50, 63 AS32l1-03 1 2 R(PT) 63, 80, 100 AS42l1-04 Note 1) : Nickel plated model is standard. How to Order F S K 1 0 03 06 3 2 AS Sealant Option Speed controller None Component Parts Hexagonal lock nut Nickel plated K N No.

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

RQ

50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

MXW

40 40 L Data 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N 1) x H G Bottom through-hole 5.1 GG HH H 7 NN-M6 x 1 thread depth 12 depth 5.5 6H9 +0.030 0 Bottom through-hole 5.1 F E 6H9 +0.030 depth 5.5 0 (mm) H HH Z NN N L K J GG G F E Model MXW20-150 48 412 1 6 66 41 169 29 101 216 113 MXW20-175 52 462 1 6 91 66 194 50.5 128.5 237 140 MXW20-200 48 512 1 7 116 91 219 56 152 264

CE

2 #1 Rolled steel Cushion seal Cushion ring A 40 to 63 NBR !3 #2 J Rolled steel Cushion ring B 40 to 63 Piston gasket NBR #3 !4 Cushion valve Port seal 40 to 63 NBR #4 !5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

CE

2 #1 Rolled steel Cushion seal Cushion ring A 40 to 63 NBR !3 #2 J Rolled steel Cushion ring B 40 to 63 Piston gasket NBR #3 !4 Cushion valve Port seal 40 to 63 NBR #4 !5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

Model Selection 1

In the case of obtaining an accurate flow rate, refer to front matter pages 1 to 6.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

With protective cover Side seal Note) Piping None With side seal Suffix for stroke adjusting unit Note) Nil K Nil G Standard type Centralized piping type Nil S Both ends One end Note) Cylinders with side seal are available for 16 to 40. Note) S is available when stroke adjusting units are A and L.

KR

Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03 2-applicable tubing 1 4 KGU10-02 40 28.4 30 40 65 61 62 65 19 18.5 3 8 KGU10-03 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Note) D: Max. diameter Reference dimensions after R thread installation.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

for 16 to 40.

Compact Guide Cylinder

2), 63 (45 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view 2 x P (Plug) WA + Stroke/2 Z 4 x MM depth ML L 4 x OA through 4 x OB counterbore depth OL (OL) 4 x NN through 2 x P (Plug) U X PW H VA PE T R 2 x P D GB GA S Q 2 x P (Plug) JC K J PD FB FA C + Stroke A + Stroke G [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 50 (40 x 2) 25, 50, 100, 150,

MK

to 53 Chrome molybdenum steel Replacement Parts: Seal Kits 32 40 MK2-40-PS 50 MK2-50-PS 63 MK2-63-PS Bore size (mm) Part No.

2/3 Port Valve

Refer to p.0-33 for Safety Instructions and p.0-37 to 0-40 for common precautions. External Pilot Vacuum Pilot Caution When using the VNB 1V N.C. vacuum pilot, maintain the specified pilot pressure by providing a tank with an appropriate capacity or by acquiring the pilot pressure from an area near the vacuum pump.

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.