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WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

VQ5000

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted 6 Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000

ISO Cylinder

66 40 23 98 ( ): For air cushion Refer to page 12 of Standard Type Single Rod for details of accessories (rod end, double knuckle joint, floating joint).

MY1

82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9

90

w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9

Refrigerated Air Dryers

Refrigerant R134a (HFC) IDU E Construction (Air/Refrigerant Circuit) IDF190D IDF240D w Air cooler q Air re-heater Compressed air inlet High temperature humid air from the air compressor passes through the air re-heater q and is pre-cooled by dehumidified cool air. Then, it is cooled to the specified temperature by the air cooler w using the evaporation heat of refrigerant.

Profile Design ISO/VDMA Air Cylinder Series CP95

A Q value of approximately 620 Nl/min is obtained. 1500 2000 1500 2000 4.The 620 Nl/min.theoretical value is multiplied by 1.4 Q = 620 Nl/min. 1.4 Q = 870 Nl/min. 160 1000 1000 Maximum air consumption Q [Nl/min.]

Electric Actuators

Home position switch De-energized operating type 0.1 Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications LC6D-220AD-Q (Refer to page 306 details.) LC6D-507AD-Q (Refer to page 306 for details.) Applicable driver Holding plate: MB1(1 pc.), Phillips countersunk head screw M3 x 6l (1 pc.)

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Speed Controller: Standard Type Series AS In-line Type 1

4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

1

72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB Z Shock absorber Model Nil TN TF CY1F10 CY1F10 M5 x 0.8 +0.012 0 3 1 4 6.5 depth 3.4 4 3.4 98 RB0805X552 CY1F15

Set Flow: 50 (20~50l/min), Thread: N (NPT), Port Size: 06 (3/4), Terminal Box: 6 [Terminal Box (For 24VDC, +COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)]

Set Flow: 50 (20~50l/min), Thread: Rc(PT), Port Size: 04 (1/2), Terminal Box: 6 [Terminal Box (For 24VDC, +COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)]

Set Flow: 20~50l/min, Thread: NPT, Port Size: 3/4, Terminal Box: 6 [Terminal Box (For 24VDC, +COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)], CE-compliant: -

Set Flow: 20~50l/min, Thread: Rc(PT), Port Size: 1/2, Terminal Box: 6 [Terminal Box (For 24VDC, +COM, Contact 1a)], Neon Lamp: 6 [LED Light (Green for 24VDC)], CE-compliant: -

Low Profile Guide Type

+ Stroke) Q + Stroke CY1F 4 x MM thread depth ML (LL) LA 6 x YA recessed area Note 2) XAH7 PA Adjustment bolt Max. approx.