ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

MG

weight m (kg) Load weight m (kg) 10 10 40 40 5 5 32 32 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL80, 100 (14) V = 400 mm/s 200 100 100 Load weight m (kg) 80 50 10 10 50 100 200 Eccentric distance l (mm) 8-19-31 Series MGP Horizontal Mounting (Slide bearing) MGPM16 to 100 (15) l = 50 mm, V = 200 mm/s (16) l = 100 mm, V = 200 mm/s 100 50 50 80

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

15

70 10 75 Stroke [mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 LEYG32M Load mass m [kg] Load mass m [kg] LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max

LX

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy ( ) 50 to 100mm stroke Non-rotating accuracy ( ) 0.09 1 0.1 10 50 100 Eccentric

Air Cylinder

With Rod Boot (mm) B3 e f h l Z Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 32 36 18 72 85 97 110 135 160 185

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

V, 200 V, 12 V, 24 V, 48 V, 110 V, 220 V 240 V With surge voltage suppressor (S) (Grommet type) With light/surge voltage suppressor (Z) (Grommet terminal) (Conduit terminal) (DIN terminal) L plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug

Proposals for Energy Saving

min or l).]

TABLE OF CONTENTS

ORIFICE SIZE Gas Liquid Inlet Exhaust AC DC AC DC Model ELW51 2 Way Normally Open ELW51G8XCCP ELW51H8XCCP (G or L) ELW51J8XCCP (G or L) ELW51V8XCCP (G or L) ELW51K8XCCP (G or L) 300 270 135 70 55 200 120 50 35 30 300 120 40 30 25 200 65 30 20 15 G 132 DE-ENERGIZED ENERGIZED H 364 J 116 V 564 K 332 600 250 150 100 85 50 15 200 80 50 25 20 600 250 150 100 85 50 15 200 80 50 25 20 Model ELW52

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Secondary Batteries

B L F G C D T Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style Cylinder stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 500, 600 50, 63 Built-in Magnet Cylinder Model 25, 50, 75, 100, 125, 150, 175, 200, 250, 300,

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

MGP

M L MGP 25, 50, 75, 100 16 MXS 20 25 32 40 50 63 MXQ MGP 25, 50, 75, 100, 125, 150, 175, 200 M L MXF MXW 80 100 M L MGP 50, 75, 100, 125, 150, 175, 200 MXP OUT(N) IN(N) Theoretical Force MG (N) Rod dia.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC 100, 110, 200, 220 VAC DIN terminal 24, 12 VDC 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC Grommet L plug connector M plug connector M8 connector WO: Without connector cable W: With connector cable Note 2) M: With lead wire (Length 300 mm) MN: Without lead wire MO: Without connector L: With lead wire (Length 300 mm) LN: Without lead wire LO: Without

CL

L E N 25 CL1 MLGC CDLG1 With auto switch H7BW 100 L E N 25 CNG Built-in magnet Number of auto switches MNB 2 pcs. 1 pc. n pcs.

MXQ

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Value in the initial state) Solenoid specifications Grommet(G), (H) , L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry Base mounted G, H, L, M, W D JIS Symbol 24, 12, 6, 5, 3 24, 12 DC AC 50/60Hz Rated coil voltage V 100, 110, 200, 220 10% of rated voltage 0.35 {With indicator light: 0.4 (DIN terminal with indicator light: 0.45)} 0.1 (With

IDG

5 to 50 Inlet air temperature (C) (1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320 400 Outlet air flowrate (l/min(ANR)) Purge air flowrate (l/min(ANR))(3) 75 110 170 240 300 25 40 57 80 100 Inlet air pressure (MPa) 0.7 Inlet air temperature (C) 25 25 25 1 l/min (ANR