ZP

29.5 40.3 58.1 4.5 2.3 Deep Deep Model A B C D E F Y G G H: M6 x 1 H: M8 x 1.25 H: M5 x 0.8 H: M6 x 1 H: M8 x 1.25 Model A B C D E F Y G G G ZPR40D 40 43 29 42.5 53.3 71.1 6 8 17 ZPR25D 25 28 20 35 45.8 63.6 5 6 8 10 Applicable Tubing Applicable Tubing Applicable tubing O.D.

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

ZP

Model Model ZPT20B-0-A10 ZPT40B-0-A14 12.4 47.5 24.4 20 22 23.5 32.5 25 40 48 16 43 34 10.5 ZPT25B-0-A10 ZPT50B-0-A14 15.6 25 27 24 33 28 51.5 32.4 50 57 19 53 38 ZPT32B0-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 20 25 32 Model F F H E E F H F E E E F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 64 60 150.5 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10

smcmaintenancepartslist

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G Replacement Parts Description Note Material Part no. No.

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

&snac

&snac INSTRUCT ION MANUAL ( | D X o M B o 3 o ) I D G 3 , I I D G 3 M , I I D G 3 V , I I D G 5 , I r r ^ n r , I D G s M ' l I V I U U E . L I D G s V , I 7\cau t i on0 p e r a t i o n f M a k e s u r e t o o p e r a t e l { i t h i n s o e c i f i c a t i o n s . ( R e f e r t o p . ?

ZP

6 08 8 G Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

ZP

EPR 13-11-91 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 Rc 1/8 I I Rc 1/8 Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 4-M4 x 0.7 45 Width across flats 24 3-M3 x 0.5 28 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B D B D Dimensions Dimensions (mm) (mm) A B C D E G H I Y A B C D E G H I Y F F Model Model ZPX40HB-B01

Table of Contents

Unit Series AC20D to 40D Dimensions AC20D A F N E P K C G G IN OUT Q F.R.L.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Modular Design with Uniform Body Style

E1 E2 E3 E4 -D N T AW20-mmm S Panel cutout dimensions F R Y W Clearance for maintenance G B C Q V K IN OUT IN OUT Z 2 x P1 (Port size) Plate thickness AW20-D to AW30-D : Max. 3.5 AW40-D to AW40-06-D : Max. 5 Drain A E E1 E2 E3 E4 -D to AW40-mmm E E1 E2 E3 E4 -D AW30-mmm D U M J N T S F R C Q V K IN OUT 2 x P1 (Port size) B Clearance for maintenance G Drain A E E E1 E2 E3 E4 -D AW60-mmm T

SY

(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.

A

See Pressure Gauges Page P R E S S U R E G A U G E S Courtesy of Steven Engineering, Inc. !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Table of Contents

G S B + Stroke A + Stroke E For bore sizes 12 and 16, M5 x 0.8 is only available.

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

CA2

9 6-8-19 20 Series CA2W Basic Style: CA2WB 2-P (Rc, NPT, G) Width across flats KA 4-J G G M Width across flats KA 2-cushion valve MM MM D E D E H1 H1 AL AL B1 N F K A N F K A B C S + Stroke H H + Stroke ZZ + 2 strokes e e e l + Stroke f 9 f 9 l l 9 f Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated