LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

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p to 18 socnoids possbe '_!

VQ4000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double

Compact Hydraulic Cylinder

Bore size (mm) NN P S X ZZ Y 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 238 Round Type Hydraulic Cylinder: 3.5 MPa Series CHmM Rod flange style: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4 x FD H1 H2 2 x NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S + Stroke

LEC-OM069xx

The PC or PLC...etc may not be able to monitor a brief change in the P-OT or N-OT signal to P-OT=1 or N-OT=1.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Supply the following power to L11 and L21.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPT NPTF G N T F VV3ZA2 031 01 50 Thread type VZA200 01 S Thread type Nil Nil Rc NPT NPTF G Rc NPT NPTF G N T F N T F 1800 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA4 2-P-01 Pilot port M5 x 0.8 Mounting hole 2 x 3.4 2 x 3.4 mounting hole (Non-locking

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Sine Rodless Cylinder Series REA/REB

thread length E TC X F WP WP GW GP QW PW 4 x LD D Piping port P Operating direction A 7 W K G Piping port P Operating direction B Piping port P (Plug) Operating direction B HS CR With switch rail Q + Stroke Z + Stroke HR Plug 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A 12.5 19.5 16 Plug REBR15 REBR15 REA (mm) A

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

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Approximate response time uptc the tIme of W: Lift force (kgf) P: Vacuum pressure(mmHg) S: Pad area (c m2) adsorption will be worked out by following the equation below. Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

3 Port Air Operated Valve

Base mounted Body ported 2(A) 1/4 3/8 P. 1558 8.9 (P)1 3(R) VPA700 For vacuum N.C.

REA/REB

F2 D 1.6 x ---P F3 D 1.6 x ---P F1 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 10-2-18.)

REA/REB

-06-X214 AS2301F-01-06-X214 2.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

VZ5000

02 G H VK Manual override (Non-locking) (Mounting hole) VZ VF VFR VP4 (Lead wire length) VZS G: 300 mm H: 600 mm 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFS VS4 2-Rc 1/4 (5(R1), 3(R2) port) VQ7 EVS (PE port) VFN L plug connector (L) VZ5140-LM plug connector (M) VZ5140-M(Lead wire length) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

-fl Seies

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.