MGC

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

Sine Rodless Cylinder Series REBR Direct Mount Type

First tentative bore size determination W D 1.6 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation (Refer to page 75 for vertical operation.)

CYP

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) C 5.4 8.6 A 8 12 B 9.5 14 E 4H9 6H9 ED 9.5 13 EK 4 6 F 12.5 25

CG5-S

Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

ISO Cylinder

Modify the detecting position while the auto switch is secured at the position of (3) in the figure. y r a w t Auto switch mounting bracket b Auto switch mounting screw M2.5 x 0.45 x 6 L q Cylinder BQ2-012 is a set of a and b shown above.

Compact Cylinder with Air Cushion

-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l M8 x 90l x 100l x 110l x 135l x 160l M10 x 105l x 115l x 140l x 165l M10 x 120l x 130l x 155l x 180l M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l 9 8 9.5 13.5

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

IIIIIII

t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)

Angle Seat Valve /

Step 2 w Item Selected item Symbol VXB2 1 5 A H B L w H High pressure Pressure type Select Thread type. Step 3 e Item Selected item Symbol VXB2 1 5 A H B e L B NPT Thread type Select Indicator. Step 4 Item Selected item Symbol r VXB2 1 5 A H B L L Yes r Indicator For special options, refer to page 5.

CE

x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

3

Basic (mm) (mm) A B C D E F Yh9 H 25 29 32 38 15.5 20 5 7 M3 x 0.5 M5 x 0.8 5.5 6.5 6 8 MKB12-Z MKB16-Z Clamp stroke Model 11 14 Rod state Model 0 0.043 0 0.043 20 mm Q R 88 115.5 88 115.5 30 mm Q R 108 145.5 108 145.5 10 mm Q R 68 85.5 68 85.5 Retracted Extended Retracted Extended MKB12-Z 45.5 55.5 65.5 MK MK MKB16-Z 45.5 55.5 65.5 MK2T Note) The above figure is with the auto switch (D-M9

VDW

Model C [dm3/(sbar)] Av x 106(m2) Cv converted b Cv N.C. 0.04 0.40 0.14 0.96 1 0.04 VDW10 M5 0.07 0.25 0.30 1.7 1.6 0.07 0.09 0.45 0.31 1.9 1.6 0.08 M5 1/8 (6A) VDW20 0.18 0.45 0.58 4.3 2.3 0.18 0.33 0.38 1.2 7.2 3.2 0.30 0.16 0.52 0.52 3.8 2 0.16 1/8 (6A) 1/4 (8A) VDW30 0.30 0.52 1.0 6.7 3 0.28 0.46 0.49 1.5 11 4 0.44 17-2-65 6 Series VDW10/20/30 Construction VDW11 VDW21 i i w w e e r r

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Mechanical Valves Series NVM, NVFM, NVZNI

t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)

IDX-OM-Z004

G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3

5 Port Solenoid Valve, Series VQC

Applicable connector: D-sub connector (25P) (Conforms to MIL-C-24308) 2-C8 3(R) port n 1 2 3 4 5 6 7 Stations D-side 8 U-side DIN rail clamp screw 62.5 60 40.5 35 18.5 25 7.5 9.5 (7.5) (12) 2-C8 1(P) port 20.5 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 102 n: Stations (

Compact Type

5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.