CJ5-S

GA GB H H1 I J K KA M MM NA P S ZZ MQQ M 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 1/8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

MGP

M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19 5 6 6 15 18 21 30 36 42 15 18 21 22 24 30 16 20 25 78 62 10.5 M5 X 0.8 M5 X 0.8 37.5 10.5 25 25, 50, 75, 100, 125, 150, 175, 200 78.5 62.5 11.5 M6 X 1.0 M6 X 1.0 37.5 13.5 28.5 WA WB Bore (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175st 100 to 175st 75st

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

12.5 14 8 33.6 20 8 16 5 66 46 24 64 24 27 13 86 9.5 7 85 M10 x 1.5 x 15 12.5 14 8 41.6 25 10 20 5 76 57 25 74 25 31 17 104 10.5 10 95 PA PB PW QW S T TT ta tb Q W Z M (N) MM NN P LD Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 8 7.5 M5 x 0.8 M8 x 1.0 M5 x 0.8 5.6 30 50 75 30 62 12.5 22.5 0.5 1 75 72 97 10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73

SMC

x 0.8 thread depth 5.5 Operating port 2-M5 x 0.8 11 3 Vacuum sunction port M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA-M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end 12 6 N-M5 x 0.8 thread depth 6 (Insert) 6 4-M5 x 0.8 thread

Air Slide Table Series MXP

Stroke: S MXQ 2 x M4 x 0.7, depth 6 2 x M5 x 0.8, depth 8 MXP16-20 MXF A Width across flats 8 Width across flats 3 H Piping port 4 x M5 x 0.8, depth 7 17 11 26.7 (Plug: M-5P) 2 x M5 x 0.8 M6 x 1 10.5 MXW 5 MXJ 5.5 MXP 35 34 MXY 8.5 MTS 4 x M6 x 1 4H9 0 +0.030 , depth 4 4H9 0 +0.030 , depth 4 A Pilot hole diameter 5.1 19 6.5 320.05 0.50.05 30 D B 2 x M5 x 0.8 Piping port W 47 46 13 4H9 0 +

Electric Grippers

Bolt LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 LEHF10 LEHF20 LEHF32 LEHF40 M3 x 0.5 M4 x 0.7 0.9 1.4 M3 x 0.5 M5 x 0.8 0.9 3.0 M4 x 0.7 M6 x 1 1.4 5.0 M5 x 0.8 M6 x 1 3.0 5.0 M5 x 0.8 3.0 M6 x 1 5.0 When using the thread on the back of the body When using the thread on the back of the body Max. screw-in depth L [mm] Max. tightening torque [Nm] 10 Max. tightening torque

VEX1

VEX3222 None With plug 2 x 4.5 (Mounting hole) L plug connector (L) M plug connector (M) M5 x 0.8 (P2) Refer to Table (1).

V

www.stevenengineering.com I 2.61 SOLENOID VALVES SERIES (N)VZ300 H O W T O O R D E R M A N I F O L D T Y P E 40 B O T T O M P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 B O T T O M P O R T E D (N)VV3Z3 40 2 N U M B E R O F S TAT I O N S 02 2 stations to 20 20 stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) 01T 1/8 NPTF ACCESSORIES M

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Symbol Manifold Without port Nil 0 2 3 5 Filter only Vacuum pressure switch 0 1 2 3 4 5 Without fitting (M5 x 0.8) Without fitting (M5 x 0.8) VVQ1000-50A-M5 KJS04-M5 4 (Straight) 3.2 (Straight) KJS23-M5 VVQ1000-50A-C3 Single unit KJS06-M5 6 (Straight) 4 (Straight) KJS04-M5 VVQ1000-50A-C4 KJL04-M5 4 (Elbow) 6 (Straight) KJS06-M5 VVQ1000-50A-C6 3.2 (Elbow) KJL23-M5 VVQ1000-F1-LC3 4 (Elbow

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 ( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth

CY1

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5 Across AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model M MA W H S Z J V K L MXP16-20B 40 30 65 58 20 102 93 82

Electric Slide Tables

/24 VDC) LES LESH A 2 72.5 10.5 9.5 5.1 29 24 22.5 2.5 45 A 37 9 35.5 5.5 13 D x M5 x 0.8 thread depth 6.5 Note 4) (D/2 1) x C C 19 3 x M5 x 0.8 thread depth 8 Table operating range Note 1) 1 [1] 8 K Origin Note 2) [Stroke end] Stroke end [Origin] Note 3) LECA6 LECP6 LEC-G LECP1 LECPA 16.5 N 13 (M) Stroke (2.3) 4H9 ( ) depth 4 (G 1) x F 18 F +0.030 0 40 (25) 5 J +0.030 0 4H9 ( ) depth 4

SMC Pneumatic Clean Series

B F MM NA GC GA C A M12 x 1.0 M10 x 1.0 NN M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 10112122Axial foot style (L) / CJ2WL, CJ2WL GA GC Piping port 4-M5 x 0.8 MM NN GC NN F GA F MM Cover surface D D LY LB LH X A Y Y X LX A NA NA LZ H S + Stroke H + Stroke Z + 2 x Stroke 2-LC Mounting hole (mm) 16 10 15 15 5 4 8 8 11 11 28 28 23 21.5 5.5 5.5 2.3 2.3 GA LC Bore size

Auto Switch Guide

x 0.8 x 16 MVGQ M5 x 0.8 x 20 CC M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C RB D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland J D-X G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 20Hexagon socket head cap bolt Hexagon socket head cap bolt Data Indicator

SMC Pneumatic Clean Series

x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 10112122Axial foot style (L) / CBM2L, CBM2L H Relief port M5 x 0.8 24 2-P (Rc, NPT, G) A K F AL H2 F DL 2-NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4-LD 2-LC MM Width across flats B2 G Relief port G Relief port M5 x 0.8 LT 20, 25 (This drawing