10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.8 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.6 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.8 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.8 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

L/min 0.5 to 0.5 L/min range 2 to 200 L/min 5 to 500 L/min 150 to 3000 L/min 0 to 1 L/min 0 to 3 L/min 1 to 1 L/min 3 to 3 L/min 10 to 1000 L/min 1 to 50 L/min 10 to 100 L/min 20 to 200 L/min 300 to 6000 L/min 2 to 100 L/min 600 to 12000 L/min Power supply voltage 24 VDCp10% 24 VDCp10% 12 to 24 VDCp10% 12 to 24 VDCp10% (25C reference) characteristics p3%F.S.(15 to 35oC) p2%F.S.

tTV2000/3000

Note 3) The minimum unit for 1ry205 is l PSl I'relerre# i.rirfilri:: i'fiprafi: How to Order Model Pressure 0 Current WDe 4 to 2OmA Cunent type 0 to 20mA 2 Voltaoe tvpe 0 to SVDC 3 Voltaoe tvoe 0 to 1oVDC connector type S : l Straioht tvDe 3m L Right angle type 3m N Without cable connector d Preset input Monitor output Option (bracket) Thread type Port size 2 114 (2OOO,3000 type) 3 3/8 (2000

Digital Flow Switch (Remote type sensor unit)

. -20No.PF-OMJ0016-J Specification Specifications Model PFM510 PFM525 PFM550 PFM511 Applicable fluid Dry air, N2, Ar, CO2 (air quality class to ISO8573-1 1.1.2 to 1.6.2) Dry air, N2, Ar 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min Rated flow range CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max. Repeatability 1%F.S. max.

20

L1 (Extension nozzle length) Width across flats 14 R1/4 D L L2 H1 Outside diameter 4 Series VMG Dimensios: Nozzle Cover Cover for male thread nozzle [mm] Nozzle cover part no.

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -