Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

Low Maintenance Filter Series FN1

OFF t Drain valve Open Close 1 2 3 4 5 Stops pressure feed. w Air supply valve: Close t Drain valve: Open r OUT side valve: Open e IN side valve: Open Back flushing switch OFF ON The M/C stop signal and a signal for element clogging (differential signal switch) are used to start back flushing.

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

CE2

e r t y u i o !

HRX-OM-R005

HRS 20 A 060 Cooling capacity Option 060 4900W/5900W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type W Fixed SI unit(1) 1) Unit : MPa/ (degree Celsius) Piping thread type Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase AC200 to 230V(50/60Hz) N NPT

VT325

Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

DOC1020530

PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.

VCB

Made to Order Specifications Oil-free specifications VCB X10 17-2-25 6 Series VCB Construction q w e r Component Parts t Material Description No.

NVEPA|VEFseies

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Round Type Hydraulic Cylinder

1 u t w y CHK CHN CHM CHM CHS CH2 o !

Electro-Pneumatic Valve NVEP/NVEF Series

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Micro-Mist Separator with Prefilter Series AMH

---t;F=f=='Tjt IN Bracket (Option) N ...'---Ht-t---t-+-H I--i IN o I w c.

3M/SMseries

++t&F Eft!

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Note 5) The surface treatment of the lock nut option-J (round type) is electroless nickel plating. 487 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) (Hexagon width across flats) Applicable tubing O.D. d 2 tubing type AS121F-M3-02 AS121F-M5-02 D2 Applicable tubing O.D. 2 A L4 D1 L3 M T L1 (Hexagon width across flats) H D3 Metric Size

VT307

)2 W DC/Energy-saving type VT/VO307W Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO307V, VT/VO307W) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector valve, etc. 307 01 5 D V T F SY SYJ Body type Option T Body ported 0 Manifold VK

ITV

Y30 Y40 Spacer 234 Y30L Y40L Spacer with L-bracket Y30T Y40T Spacer with T-bracket qAF4000 wAFM4000 eITV3000 Modular Products and Accessory Combinations Applicable products and accessories Applicable model ITV20ll ITV30ll AF3000 AF4000 q Air filter w Mist separator e L-bracket r T-bracket t Spacer y Spacer with L-bracket u Spacer with T-bracket AFM3000 AFM4000 B310L B410L B310T B410T Y30

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Electrical entry Light and surge voltage suppressor Without Symbol Electrical entry Grommet (DC specification) L type plug connector with lead wire L type plug terminal without connector M type plug connector with lead wire M type plug terminal without connector G L LO M MO With Note) Standard lead wire length: 300mm.