VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

VQ5000

5 1 1 Option 08 Series Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner for Rc1 1/2: D side exhaust Exhaust cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Symbol 5 VQ5000 Nil CD1 CD2 CU1 CU2 K Note3) Cable length Manifold type 0 1 2 3 Without cable Cable length 1.5m Cable length 3m Cable length 5m 1 Plug-in unit Stations Cylinder port size 02

PA3000/5000/PAX1000

Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

3 Port Solenoid Valve

Number SS070A 01 1A O-ring FKM 10 SS070A-80A-1 Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel 10 SS070A-80A-3 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > 2 U side end plate assembly No.

VDW

Material Manifold material Seal material NBR FKM EPDM NBR FKM EPDM Symbol Nil A B G H J Thread type Rc G NPT Nil F N Brass (C37) 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations 02 Series 20 p p 2 stations Symbol Port size 10 p 30 p p M5 01 02 10 M5 1/8 (6A) 1/4 (8A) 10 stations Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves

5 Port Solenoid Valve, Series VQC

Note) Available for the rubber seal type only. 25 Manifold Specification Sheet Series VQC4000: Base-Mounted Type/Plug-in Unit How to order manifolds VV5QC 4 1 08 TD0 02 T Kit 1 2 3 7 VV5QC 4 1 16 SDQW 02 S Kit Series VQC4000 4 5 6 Base-Mounted plug-in Stations Electrical entry Options 01 1 station Nil None Special wiring specifications Note 1) (except for double wiring) D-side entry Kit

Directional Control Driver for Electric Cylinder

A3 A5 DC motor (cylinder size 3) DC motor (cylinder size 5) Option Cable for power supply terminal LC3F2 1 C1 02 1 CN1 Power Supply Terminal Table 2 3 1 Optional cable color Terminal Function Pin number Cable type Cable length 01 02 1 m 2 m Yellow/Green FG Frame ground 1 Cable for CN1 power supply terminal C1 Cable length 60 5 60 5 2 Brown DC (+) Driver power supply (+24 V) Cable for

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

VS7-6

Unit Air filter (Auto drain, Manual drain), Regulator, Pressure switch, Air release valve SX VV71-P-(02: ,03: ,C10: 10) Individual SUP spacer Individual EXH spacer Gallery blank disc (Differential pressure style) 1 4 3 8 VV71-R-(02: ,03: ,C12: 12) 1 4 3 8 AXT502-14 VK Including F.R.Unit ( equivalent to 2 stations ) VZ The manifold Series VV71 has a wide variety of functions and piping, compatible

Pressure Range: ISE70 (0 to 1 MPa), Piping: N02 (NPT 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)

Piping: G1/4, ISO1179, Output: 43 [NPN Open Collector 1 Output (Pin No.:4)+PNP Open Collector 1 Output (Pin no.:2)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: G1/4, ISO1179, Output: 65 [PNP Open Collector 1 Output (Pin no.: 4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: NPT1/4, Output: 43 [NPN Open Collector 1 Output (Pin No.:4)+PNP Open Collector 1 Output (Pin no.:2)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: NPT1/4, Output: 65 [PNP Open Collector 1 Output (Pin no.: 4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: NPT1/4, Output: 27 [NPN Open Collector 2 Outputs (Pin no.: 2,4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: G1/4, ISO1179, Output: 67 [PNP Open Collector 2 Outputs (Pin no.: 2,4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Pressure Range: 0 to 1 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration

Series IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area