0.01

Piping tubing length 0.4 0.8 Response time (sec) Response time (sec) Piping tubing length 10 m 0.3 0.6 8 m 8 m 5 m 0.2 0.4 5 m 3 m 3 m 0.1 0.2 1 m 0 0 0.35 0.05 0 0 0.16 0.02 0.3 0.25 0.2 0.15 0.1 0.14 0.12 0.1 0.08 0.06 0.04 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

KR

Note) D1: Max. diameter Union Elbow: KRL M Effective area (mm 2) Weight (g) Applicable tubing O.D.

Electric Slide Tables

m L2 [mm] L2 [mm] L2 [mm] 1,000 1,500 1,000 L2 1,000 500 500 500 00 2 4 6 00 3 6 9 00 0.5 1.0 1.5 2.0 Work load m [kg] Work load m [kg] Work load m [kg] 500 1,500 600 1,250 500 400 1,000 400 L3 300 L3 [mm] L3 [mm] L3 [mm] 750 300 200 Mer m 500 200 100 250 100 00 3 6 9 00 2 4 6 00 0.5 1.0 1.5 2.0 Work load m [kg] Work load m [kg] Work load m [kg] 2,000 2,000 1,500 1,250 1,500 1,500 Pitching

Manifold Specifications

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

2/3 Port Valve

Note 3) Value on option "V", "M" (Non-leak, vacuum).

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CLKQ M G P G P Table 2.

7

A filtration degree of 5 m or less should be selected.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

650 666 120 136 146 162 L1 = 56n + 64 L2 = 56n + 80 139 Rc 1/2 14 PA P 14 PA 80.5 4-1/8 12, 14 port R1 R1 67 L1 = 56n + 90 L2 = 56n + 106 40 (41.5) 38 (27) Rc 3/4 1 3 5 SMC Dimensions inside ( ) are for Rc 3/4.

ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch.

Uniaxial Electric Actuator Series LJ1

10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4

Short Stroke Electric Actuator Series LX

L2 (mm) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 212 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BD Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 28 G 58 5H9 +0.030 0 depth

Transfer

Pitch moment Yaw moment : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) m : Load mass (kg) F : Load (N) FE : Load equivalent to impact (at impact with stopper) (N) a : Average speed (mm/s) M : Static moment (Nm) M1e = We x L3 x 1 3 M3e = We x L2 x 1 3 M1e M3e We We L3 At collision: = 1.4a a L2

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

New

Rated voltage Rated voltage Electrical option Electrical option GDM2A-G-S2 24 VDC 24 VDC 12 VDC 100 VAC 100 VAC 110 VAC 110 VAC 200 VAC 200 VAC 220 VAC None C18312G6GCU GDM2A-R None 220 VAC 230 VAC 230 VAC 240 VAC 240 VAC 24 VAC 24 VAC 48 VAC GDM2A-G-Z5 GDM2A-R-L1 GDM2A-R-L1 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L5 GDM2A-R-L5 48 VAC 24 VDC

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

HRX-OM-I051

HRX-OM-I051 1stEditionJanuary.2005 Rev.May.2018 Operation Manual Original Instructions Thermo-Chiller HRZ001-L HRZ002-L HRZ004-L HRZ008-L HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-L2 HRZ002-L2 HRZ004-L2 HRZ008-L2 HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S Save This Manual Carefully