High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

Air Cylinder NCA1 Series

C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact P/A Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB F G M N X D E C L S O R P U J T B BA BB BC ME3 Head Square Mount (8 to 14) ME4 Cap Square Mount (8 to 14) MF1 Front Flange (1.5 to 6) MF2 Rear Flange

VQ4000

Stations (Maximum 16 stations) Formula L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) L n Dimensions L n Dimensions 8 263 276 L1 L2 7 238 251 8 263 276 L1 L2 6 213 226 7 238 251 5 188 201 6 213 226 4 163 176 5 188 201 3 138 151 4 163 176 1 2 113 126 3 138 151 1 2 113 126 88 101 88 101 L n L n 9 288 301 15 463 476 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 9 288

CJ2

Bore MM A D L R N W Flat Round TDH10 TZ TY TX TN TW TK TV Part No.

C95

(n 2) 75 + 30 (n 2) 80 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n (Different sides) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1, 2 15 15 80 85 90 90 95 100 Z7 15 + 40 (n 2)/2 15 + 40 (n 2)/2 80 + 40 (n 4)/2 85 + 40 (n 4)/2 90 + 40 (n 4)/2 90 + 40 (n 4)/2 95 + 40 (n 4)/2 100 + 40 (n 4)/2 n

MHK2

0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 40 40 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 30 30 0.4 MPa 0.4 MPa L L 20 20 0.3 MPa 0.3 MPa 10 10 0.2 MPa 0.2 MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 50 Gripping force (N) Gripping force (N)

MHK2

point L (mm) Gripping point L (mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 50 Gripping force (N) Gripping force (N) 60 50 40 0.5 MPa 0.5 MPa 40 30 0.4 MPa 0.4 MPa 30 0.3 MPa 20 0.3 MPa 20 10 10 0.2 MPa 0.2 MPa 0 0 20 40 60 80 20 40 60 80 Gripping point L (mm) Gripping point L (mm) MHK2-25D MHK2-25D 100 120 Pressure 0.6 MPa Pressure 0.6

Wedge Cam Operation Gripper Series MHK2

Holding MHKL2 series MHKL2-16D MHKL2-16D 50 50 40 40 Holding force N Holding force N Pressure 0.6MPa Pressure 0.6MPa 30 30 0.5MPa 0.5MPa L L 0.4MPa 0.4MPa 0.3MPa 20 20 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L mm Holding point L mm MHKL2-20D MHKL2-20D 80 60 70 Pressure 0.6MPa 50 60 Holding force N Holding force N Pressure 0.6MPa 0.5MPa 50 40 0.5MPa

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

To order a manifold with nameplate already attached, insert "N" at the end the manifold part number. 4 clips are attached for name plate mounting. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 l Suffix the number from DIN rail dimensions table below.

Wedge Cam Operation Provides

0.6MPa 40 40 Holding force (N) Holding force (N) 0.5MPa 0.5MPa 30 30 L L 0.4MPa 0.4MPa 20 20 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa

Digital Flow Switches

OFF n-1 n-2 GPM gal (US) High flow rate GPM=gal (US)/min Window comparator mode H : Hysteresis Note) Fixed SI unit [l/min or l] will be set for the type without the unit switching function. "n" H H ON Note1) Output mode is set to inverted output at the factory before shipment.

Digital Flow Switches, Series PF2A, Series PF2W

OFF n-1 n-2 GPM gal (US) High flow rate GPM=gal (US)/min Window comparator mode H : Hysteresis Note) Fixed SI unit [l/min or l] will be set for the type without the unit switching function. "n" H H ON Note1) Output mode is set to inverted output at the factory before shipment.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

4-channel Flow Monitor ( compatible)

min L/min L/min 0 to 0 to 0 to Accumulated flow display/ Set flow range 0 to 999,999,999 L 9,999,9 99.99 x 99,999, 999.9 L 0 to 999,999,999 L 99,999, 999.9 L 0 to 999,999,999 L 103 L Accumulated flow display/ Min. setting unit 1 L 10 L 0.1 L 1 L 0.1 L 1 L Accumulated pulse flow rate conversion value 0.1 0.5 1 2 5 L/pulse 0.05 L 0.1 L 0.5 L 1 L 2 L 0.05 L 0.1 L 0.5 L L/pulse L/pulse L/pulse

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type.

VQ5000

547 10 486 506 n: Stations (12 stations max.) 21 Series VQ5000 Base Mounted Type Kit (Lead Wire Kit) L IP65 available Manifold specifications IP65 enclosure available.

Integrated Controller

(Excludes when the stroke exceeds 2000 mm) Table Displacement (Reference Value) 0.08 EQFS32 (L = 30 mm) W L EQFS40 (L = 37 mm) 0.06 Displacement [mm] EQFS25 (L = 25 mm) 0.04 EQFS16 (L = 20 mm) 0.02 0 0 100 200 300 400 500 Load W [N] This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Check the clearance and play of the guide separately.

Table of Contents

L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.