ZP

Vacuum Inlet Direction Lateral R Type/ZPR Connection Male thread Female thread Pad diameter 2 to 16 20 to 32 40, 50 2 to 81 10 to 16 20 to 32 40, 50 M5 x 0.8 M6 x 1 M8 x 1.25 Connection thread M5 x 0.8 M6 x 1 M6 x 1 M8 x 1 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 Vacuum inlet One-touch fitting 4, 6 4, 6, 8 6, 8 4, 6 4, 6, 8 6, 8 1 Refer to 2 to 8 for the thin flat type and thin

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

CQ2

Spring return Spring extend C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Mounting bolt M3 X 35 l X 40 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 60 l Mounting bolt M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l Model

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Spring Return Spring Extend Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model CDQP2B12-5S -10S CDQP2B16-5S

Table of Contents

M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Table of Contents

x 0.8 (Port) XX XX VV VV 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1MG MY1MG (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5 13.5 8.5 16.2 40 10 M5 x 0.8 3.6 80 22.5 40 54 M4 x 0.7 20 MY1M16 14 28 56 40 6 27.7 100 7.5 4.5 12.5 12.5 20 46 12 M6 x 1 4.8 100 23 50 58 M5 x 0.8 25 MY1M20 7.5 33.7 17 34 60 50 Detailed Dimensions of

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

CRB2/CRBU2/CRB1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x 0.8 with depth 10 56 3-M5 x 0.8 with depth 16 25 25 A port B port 5.5 with depth M5 x 0.8 with depth 16 11.5 10g6 0.005 0.014 2 20 0 0.030 4 Vane type 6.5 10 30 45 Single

Table of Contents

(mm) (2) <M5, M6> Connection thread R <M5, M6> (1) A Weight (g) Model D P M L Nylon Urethane 2-applicable tubing D KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 10 1 8 KQ2U23-01S KQ2U23-02S 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 42 38 11 4.2 4.2 D 1 4 KQ2U04-02S 46 40 20 14 KQ2U06-M5 42.5 M5 x

V100

0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5

15

x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 12

Table of Contents

With square embedded type pressure gauge (With limit indicator) With round pressure gauge (Without limit indicator) With round pressure gauge (With limit indicator) With set nut (For panel mount) Applicable model AW10 to 40 AW10 to 40 AW30/40 AW20 to 40 AW10 AW20 to 40 AW10 to 40 Port size PPA Body size Symbol Port size (4) 10 20 30 40 (4) AL M5 01 02 03 04 06 M5 1/8 1/4 3/8 1/2 3/4 G H

Table of Contents

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3) Exhaust throttle SQ Series 38 1 4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 VFS Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 VFR VQ7 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) External Pilot (Note 2) External Pilot (Note 2) DIN terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 External pilot Sub-plate External pilot External pilot DIN terminal M8 connector SY9 40 Standard Option Made to order

ZP

Male thread Female thread 40 40 6 tube 06 50 50 8 tube 08 M5 x 0.8 A5 Pad type (Refer to Table (1) for applications.)

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

AC

Model Port size Q M B B A B C D P E F G H J K L M5 x 0.8 25 40 53 70 75 90 95 66 97.5 129 165 169 244 258 7 11 14 18 20 24 24 25 40 53 70 70 90 95 86.5 120.5 27.5 40 56 73 73 AF1000 AF2000 AF3000 AF4000 AF4000-06 AF5000 AF6000 8, 1 4 1 17 16 17 14 23 23 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2

Micro Mechanical Valve Series VM1000

(EXH port) 40 2333 Series VFM300 Series VFM300 Push button (Mushroom) VFM350-02-30R/B/G/Y O.T. T.T. P.T. Panel mounting hole 40 1.5 29.5 1.5 Max. 6 3 18.5 M5 x 0.8 (Pilot exhaust port) (141.7) PE EXH.1 SUP.