Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 200mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Foot, Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSA2, 200V to 230V, I/O Connector: w/Connector

Size: 25, Motor Mounting: In-line Type, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 50mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSA2, 200V to 230V, I/O Connector: w/Connector

Size: 32, Motor Mounting: In-line Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 400mm, Motor Option: w/Lock, Rod End: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSA2, 200V to 230V, I/O Connector: w/Connector

Size: 25, Motor Mounting: Left Side Parallel Type, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 300mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSA2, 200V to 230V, I/O Connector: w/Connector

Size: 32, Motor Mounting: Left Side Parallel Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 300mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSA2, 200V to 230V, I/O Connector: w/Connector

Size: 32, Motor Mounting: Left Side Parallel Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 200mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Double Clevis, Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSA2, 200V to 230V, I/O Connector: w/Connector

Size: 32, Motor Mounting: Right Side Parallel Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 300mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 5m, Controller Type: LECSA2, 200V to 230V, I/O Connector: w/Connector

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: A (LEY25 12mm; LEY32 16mm; LEY32 Top Mount 20mm), Stroke: 150mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input),

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 300mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Motor Type: S3 (AC Servo Motor, Incremental Encoder, Output 200W), Lead: C (LEY25 3mm; LEY32 4mm; LEY32 Top Mount 5mm), Stroke: 150mm, Motor Option: w/o Option, Guide Option: F (with Grease Holding Function), Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental

Accuracy: Basic, Motor Mounting Position: Top Mounting, Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: L (2.86mm), Stroke: 100mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/vent hole tap), Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped (Standard), Cable Type: S (Standard

MQQ

C J G5-S 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Weight/Standard Type: MQQT Supply pressure 0.3 MPa CV 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa (g) Note 1) Use clean, dry air with no freezing.

ARM10/11

Inlet pressure (MPa) 14-4-56 39 Series ARM2500/3000 Manifold Regulator Modular Style Construction F.R.L.

CLS

100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa ) P < 0.5 MPa 0.4 MPa ) P < 0.5 MPa CLS 4000 4000 250 CLQ 3000 3000 200 MLGP 2000 2000 180 160 RLQ 250 Load weight: m (kg) Load weight: m (kg) 140 1000 1000 700 800 900 700 800 900 125 200 MLU 180 600 600 160 400 500 500 ML1C 140 400 125 D300 300 200 200 -X 20[Example] 100 100

CNS

200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Please contact SMC if the maximum stroke will be exceeded.

Thermo-con/Rack Mount Type

3000 2500 2500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 15C 2000 2000 1500 1500 Ambient temperature 25C Ambient temperature 25C 1000 1000 Ambient temperature 35C 500 500 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Heating Capacity HECR002-A Circulating fluid: Tap water Circulating fluid: Ethylene

HRX-OM-W002

Ambient temp. or or Ambient temp. or or Facility water temp. 3000 Facility water temp. or or Facility water temp. 3000 Facility water temp. or Facility water temp. Facility water temp. 2000 2000 2000 2000 Facility water temp. Facility water temp. 2000 2000 Cooling capacity[W] Cooling capacity[W] Facility water temp.

CE

70500mm/s 5,12 5,12 6 4,5 CE1B12 () (500 3000) 7 14 69+ 93.5+ CE1B20 () 2x5.5 (500 3000) 4xM6x1 15 14 78+ 106+ CE1B32 4x5.5 (500 3000) 8xM6x1 20 90+ 131+ () 14 CE1B40 (500 3000) 4x5.5 8xM6x1 20 136+ 177+ 14 () CE1B50 (500 3000) 4x6.6 8xM8x1.25 20 144+ 193+ () 14 CE1B63 4x9 8xM10x1.5 20 (500 3000) 145+ 194+ () 14 2004 12 A 2014.4 B 2017.8 C 2017.11 4-14-1, Sotokanda

MQQ

Piston speed (3) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage MQQ M 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa RHC Note 1) Use clean, dry air with no freezing.