SMC

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type/Double vane type CRBU2W40-S/D h 52 64 Keyway dimensions b l h (h9) l b (h9) Model CRBU2W400 0.030 4 20 0 0.030 4 85 38 2 x 5.5 through 2 x M5 x 0.8 through 25h9 0 0.052 10g6 0.005 0.014 11.5 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 2 20 30 2 x 5.5 through 2 x 5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2 x

3 Port Air Operated Valve

9.4 38.5 63 56.5 (63) 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1(-F) 03 04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) NC 33 4.5 2A 31 41 (2) (9) 115.1 2 x 5.2 (For mounting) 1/8 12(PA) port (Mounting groove for M6 thread) (6.4) 12 (63) 64 9.4 38.5 63 56.5 31.5 (60) 51.5

Plug-in Unit

7.3 VQC4401 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal 1 (P) 5 (R1) 3 (R2) 6.2 6.4 VQC4500 0.18 1.9 0.18 1.6 45 or less 47 or less Metal seal Pressure center 3 position exhaust center with pressure release valves 7.0 VQC4501 7.1 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal (A) 4 (B) 2 2.7 VQC4600 3.7 55 or less 57 or less Metal seal Perfect 500 2.8 3.9 VQC4601 62 or less 64

MK

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R + Clamp stroke RHC MK(2) (mm) (mm) Ah9 B Model MK20-F MK25-F D E C Model MKG20 MKG25 RS Q G 0 0.043 0 0.043 0.1 0.15 13 39 60 0.1 25.5 0.15 48 15 42 64 28 52 RS H A RZQ Arm for width across flats Rod end width across flats: MK -M 20 25 MI W S With arm

Compact Cylinder

32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory) CL CD hole H9 CZ M CX M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) -0.2 -0.6 CDH9 CL CU CW

RLQ

50 19 1.6 6.6 2-cushion needle 64 50 17 PL unlocking port Unlocks when pressurized Counterbore depth 8 4-13 4-11 4-6.6 Spring washer 4 pcs.

Compact

s] Speed [mm/s] 2000 2000 2000 2000 1000 1000 1000 1000 Selectable controllability Selectable controllability End to end operation similar to an air cylinder (12 intermediate stop positions) Easy position setting using numerical inputs (Controller) Step Motor (Servo/24 VDC) Programless type (With stroke study) LECP2 Series Programless type Step data input type LECP6 Series LECP1 Series 64

240

Electric Actuators LEPY/LEPS Series Miniature Rod Type/Miniature Slide Table Type RoHS Step Motor (Servo/24 VDC) Compact and lightweight Maximum pushing force: 50 N Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS

0.01

ZSE30 ISE30 ISA2-G ISA2-H ZSE40 ISE40 Detection side piping: 64 tubing 5m Detection nozzle: 2.0 Supply pressure: 100 kPa Detection side piping: 64 tubing 5 m Detection nozzle: 1.5 Supply pressure: 100 kPa ZSE10 ISE10 1.5 1.5 ISE70 Set value ZSE80 ISE80 Response time (sec) Response time (sec) 0.05 mm 1 1 ZSE ISE Set value 0.05 mm ZSP 0.1 mm 0.1 mm 0.5 0.5 0.15 mm PS 0.15 mm 0.25 mm 0.3 mm

EXxx-OMU0020CN

Y . 64 10.3. (M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

Fieldbus system IO-Link Setting tool

EX9-ZSW-LDT1 Minimum System Requirements Components Requirements Operating system Windows10 (32-and 64-bit) Memory 2GB Free hard disk space 150MB Processor 1GHz or higher,32-bit(x86) or 64-bit(x64) Screen resolution 800 600 pixels Recommended System Requirements Components Requirements Operating system Windows10 (32-and 64-bit) Memory 8GB Free hard disk space 250MB Processor 1GHz or higher

HRX-OM-W002

61/64 Dimensions 10 mm W483xD550xH310 W483xD550xH399 Accessory20 Power supply connector,Maintenance handle for particle filter20, Operation manual,Particle filter element20 Weight 11 kg 40 41 45 HRR Series 9.1 Specifications 9-3 HRX-OM-W002 Chapter 9 Documents 1: Use the product in conditions where freezing will not occur.

LEH_C

32 32 32 32 64 PNP PNP 1P 1P 80 40 40 40 40 80 AN LECPA ( AN LECPA NPN NPN AP AP PNP PNP (m) () 8 8 8 8 L L 1.5 1 1.5 1 A A 10 10 3 3 3 3 B B 15 15 5 5 5 C C 20 20 5 () () R R S S / P.42 7.3 <> (NPNPNP) LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V)

SFOD-OMT0005CN

AddressJXC93IP Address (4)Assembly Instance Decimal Comm Format "Data-SINT" Input 100 Output 150 Configuration 105 (5)Size Decimal Comm Format "Data-SINT" Input 36[bytes] Output 36[bytes] Configuration 0[bytes] (4)(5) (1) (2) (3) -21- 4.4 EtherNet/IP SMC Step Data Object(Class 67h) Instance Attribute Access Size Name Value(Word) 1 100 Get/Set 32 STEP No.0 () () 1() 1() 2() 2() () () 64

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

MHZ

Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm

3

M MM (mm) Rod flange 10 mm Clamp stroke M 10 mm Clamp stroke MM Rod state Model 20 mm 47.5 82.5 55 90 64 103 63.5 102.5 30 mm 57.5 102.5 65 110 74 123 73.5 122.5 50 mm 77.5 142.5 85 150 94 163 93.5 162.5 20 mm 34 69 41.5 76.5 46.5 85.5 46 85 30 mm 44 89 51.5 96.5 56.5 105.5 56 105 50 mm 64 129 71.5 136.5 76.5 145.5 76 145 Retracted Extended Retracted Extended Retracted Extended Retracted

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

NA P S H1 H NN AL G MM N ZZ Bore (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 Up to 300 7.5 8 15.5 13 26 5 8 22.3 34 M8 X 1.25 M20 X 1.5 41 8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64

Series CE1

X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-12 Stroke Reading Cylinder Series CE1 Foot CE1L Bore size Stroke LT LE MK/MK2 LH 3.2 RSQ/RSG LB LA 4-O (Special cap bolt) 4-LD LX LZ LS + Stroke RSH A + Stroke LY CE1 Front flange CE1F Bore size Stroke CE2 4-FD ML2B ML1C FT FV M REA FX FL REC 4-O (Special cap bolt