Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1

PSxx-OMS0006CN

UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMS0006CN-G * FG (35 N () ,() *() 6 33 () () 30m DC(-)() * -6No.PS-OMS0006CN-G ( ) () CE/UKCA -5~50(5 ) * , 1015 10 1% 2053 LCD * -7No.PS-OMS0006CN-G N M5 ISE20 3 ISE20 -0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F -100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1

VQZ100V-OMT0001

) 5(R1) 5(R1) 5(R1) 1 1 1 1 P P P P) ) ) ) VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.

VCC

TQ Blanking plug (with O-ring) 1 VVCC12-10A-1 For 2 port valve Hexagon socket head plug (R1/4) 1 Blanking plug (with O-ring) 1 VVCC13-10A-1 For 3 port valve Hexagon socket head plug (R1/4) 2 647 VCC Series Specifications VCC12 VCC13 VCC12D Model Passage number 2 port 3 port Note 3) 2 port (Diaphragm type) Construction (Fluid contact material) Poppet seal (PEEK resin + Stainless steel) + Special

VFA3000

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

SZ3000

CompoBus/D compatible EX140-SDN1 Current consumption (within unit) 0.1A R1, R2, V, Q OMRON Corporation: CompoBus/S (16 points) compatible R1 EX140-SCS1 OMRON Corporation: CompoBus/S (8 points) compatible R2 EX140-SCS2 Mistubishi Electric Corporation: CC-Link compatible V EX140-SMJ1 Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation CC-Link compatible

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

ARM10/11

Tightening torque recommended (M5: 1.5 to 2 Nm, R1/8: 7 to 9 Nm) For sealing, use a pipe tape. PrecautionsWhen drain or oil, etc. gets into the gauge, an error may occur for pressure indication. 14-4-52 35 Construction (Individual IN) Flow Characteristics Lock nut (Body side) Inlet pressure: 0.7 MPa Outlet pressure (MPa) F.R.L.

K35-OMX0029

FU port FB port FA port R1 port P port R3 port R2 port Caution Do not allow foreign matter such as cutting chips inside the cylinder from the ports.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.

KK/KK13

Proper tightening torque Nm Connection thread size 7 to 9 NPT 1/16, NPT, R1/8 12 to 14 NPT, R1/4 22 to 24 NPT, R3/8 28 to 30 NPT, R1/2 2. When a fitting is over tightened, more of the sealant material is squeezed out. Remove the squeezed out sealant material. 3. When tightening is not sufficient, it will cause sealant failure or a loose fitting. 4.

Pressure valve/Series ASR Flow valve/Series ASQ

Port size 6 8 10 12 Flow valve Pressure valve ASR4 3 0F02 ASR53 0F02 ASR53 0F03 ASR6 3 0F03 ASR6 3 0F04 ASQ4 3 0F02 ASQ53 0F02 ASQ53 0F03 ASQ6 3 0F03 ASQ6 3 0F04 R1/4 R1/4 R3 /8 R3 /8 R1/2

Compact End Lock Cylinder Series CBQ2

Series CBQ2 Dimensions Standard type (through hole type)/CBQ2B, CDBQ2B (mm) With double end taps With double end taps: CBQ2A, CDBQ2A Bore size (mm) R1 R1 O1 thread R1 O1 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 63 M10 x 1.5 18 DL With rear lock End lock mechanism (locking type manual release) LL 4 through H effective thread depth C 11 24 2 x 4O counter bore depth R End lock mechanism

7mm Wide, Compact, Pilot Operated, 5 Port Solenoid Valve Series S0700

Solenoid specifications 5 (R1) 3 (R2) 1 (P) 0.35W (Standard) 0.1W (With power saving circuit, when energized) 4 (A) 2 (B) Power consumption N.O. N.O. Coil rated voltage 12/24VDC 5 (R1) 3 (R2) 1 (P) Flow characteristics 4 (A) 2 (B) Flow characteristics C[dm3/(s.bar)] 0.36 0.32 N.C. N.O. 5 (R1) 3 (R2) v 0.1 0.08 b 0.39 0.33 1 (P) 2-position, single/double 4-position, dual 3 port

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

IDX-OM-W053

(Ex.) 12-2 (Rc1/2) 25mm (R1/2) (R1/2 (L ) 12 1 12 L ADH4000-04 N.O() 1.6MPa 0.05 1.6MPa 400cc/min(0.7MPa ) 12-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 12-4 1. (1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4.

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.