Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment O-ring Cross recessed round head screws (with SW) (M3) End block Tie-rod For common supply blocks, reversible and double-sided mounting is available. Common supply tie-rod Industrial Filters Cross recessed round head screws (with SW) (M3) Tightening torque: 0.32 0.03 Nm 451 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 4 4.

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

Table of Contents

-15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 7-2-6 6 Mini-free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil 2 pcs. 1 pc.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 02: KJH02-M5,04: KJH04-M5 15 With Buffer: Vacuum Inlet Series ZP3 Vertical Pad diameter 1.5 to 3.5 Flat Pad type Vertical Dimensions/With Buffer: Vacuum Inlet 3, 6 mm Stroke With Buffer: Vacuum Inlet Pad Unit ZP3-T015U;J -B3 ZP3-T015U;K -B3 ZP3-T02U;J -B3 ZP3-T02U;K -B3 5 5 7 7 M3 x 0.5 M3 x 0.5 M3 x 0.5 M3 x 0.5 Vertical Width across

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

22 2 Position single Body ported type 5 Port base mounted type (With sub-plate) SYJA3220-M3 25 2 Position double 0.9 (0.05) SYJA3320-M3 M3 0.5 M3 0.5 3 Position closed center SYJA3420-M3 28 3 Position exhaust center SYJA3520-M3 3 Position pressure center SYJA3140-M5 48(22) 2 Position single Base mounted type SYJA3240-M5 51(25) 2 Position double 1.8 (0.1) SYJA3340-M5 M5 0.8 M3 0.5 3 Position

4/5 Port Air Operated Valve Series SYJA3000

x 0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

(A, B port) 7 Manual override 2-1.8 (For monifold mounting) (Light/surge voltage suppressor) Bracket 2-3.2 equivalent (For mounting) (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 1.2 (PE port) 14 M3 x 0.5 (P, R port) L plug connector (L): SYJ3 20-L-M3 (-F) M8 connector (W0): SYJ3 20-W0-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

4 8.2 A B SZ 7 M3 x 0.5 (A, B port) Manual override SY 2-1.8 (For manifold mounting) SYJ SX (Light/Surge voltage suppressor) Bracket 2-3.2 equivalent (For mounting) (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 1.2 (PE port) 14 M5 x 0.8 (P, R port) L plug connector (L): SYJ3220-L-M3 (-F) M plug connector (M): SYJ3220-M-M3 (-F) M8 connector (WO): SYJ3220-WO-M3 (-F) Approx.

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

CRQ2

M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Meter-out Meter-in 0 1 Note) M3 and M5 sizes: s (with seal) is not necessary. Thread type Cylinder side R Tube side Rc Symbol Bore size Metric thread (M3, M5) Nil Symbol Bore size Applicable series Made to Order (Refer to page 523 for details.) Unified thread (10-32 UNF) NPT N G F AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread.

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

3 Port Solenoid Valve Series SYJ300/500/700

SYJ312M--M3 SYJ322--M3 SYJ322M--M3 How to Order A port M3 x 0.5 SS3YJ3--20-05 -Stations Bracket Applicable blanking plate assembly SYJ300-10-1A 02 2 stations Nil Without bracket P R R port : : F With bracket M5 x 0.8 20 20 stations P port Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

Impact/Vibration resistance m/s2 Note) 150/30 (8.3 to 2000Hz) Dust proof Enclosure Note) Impact resistance: No malfunction when tested with a drop tester in the axial direction and at a right angle to the main valve and armature, one time each in both energized and deenergized states.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 15 1000 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 25 12-CY3B25 (Both sides) Non-lube 32 12-CY3B32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250

Process Pump

= (10-3 m2/s) = (mPas)/(kg/m3) 603 PAF Series Performance Curve: Air Operated Type PAF3413 Flow Rate Characteristics PAF5413 Flow Rate Characteristics 0.5 0.5 Cycle 4 Hz Cycle 3 Hz Cycle 2 Hz Cycle 3 Hz Cycle 2 Hz Cycle 1 Hz SUP = 0.5 MPa SUP = 0.4 MPa SUP = 0.5 MPa 0.4 0.4 SUP = 0.4 MPa Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.3 MPa 0.3 0.3 SUP = 0.3 MPa SUP = 0.2 MPa

MHF2

5.9 11 11 14 19 E M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 2-2.6 through (Mounting hole) 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Groove for auto switch mounting M2.5 x 0.45 4 1.3 12 26 4 15

Series SY100 3 Port Solenoid Valve Rubber Seal

VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ... Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold.

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.