Exhaust Cleaner for Vacuum Pump AMV Series

R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

Red and green color zones for improved visibility of pressure control range; Back side thread; Port size: G36: R1/8, NPT1/8; G46: R1/8, R1/4, NPT1/8, NPT1/4, G53, G63: R1/8, R1/4; X30 option for MPa, psi indication (G36, G46 only)

Red and green color zones for improved visibility of pressure control range; Back side thread; Port size: G36: R1/8, NPT1/8; G46: R1/8, R1/4, NPT1/8, NPT1/4, G53, G63: R1/8, R1/4; X30 option for MPa, psi indication (G36, G46 only)

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(mm) Elbow type TMH 6 8 10 12 Tube swivels 360 AS121F-M5-W2 M5 ASD Application to inch size tubing Metric size 6, 8, 10, 12 AS221F-01-W2 R1/8 AS221F-02-W2 R1/4 AS AS321F-02-W2 R1/4 Maximum operating pressure 1 MPa max.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

/8 13.8 35.5 30.5 15.5 14.6 12 32.4 27.4 26.6 33.9 17.2 15.5 28.7 38.5 R1/4 17 40.3 35.3 19.5 34.8 29.8 18.6 18.2 34.5 32.7 33.3 32.7 33.3 44.3 44.9 45.5 44.9 45.5 R1/4 19 48.3 43.3 18.2 24.3 42.8 37.8 21 R3/8 19 45.8 44.9 18.2 24.3 40.6 35.6 19 R1/2 24 54.7 49.7 22.3 28.5 47.4 42.4 24.6 36.1 50.4 Note 1) Reference dimensions Note 2) Reference dimensions of thread M5, R after installation

Air Cylinder

Applicable bore size (mm) A A1 E1 L1 MM R1 U1 ND NX NZ L Included pin part no.

51

Refer to page 372 for pivoting bracket. 371 CG3 Series Dimensions of Accessories Single Knuckle Joint Double Knuckle Joint I-G02, I-G03 Material: Carbon steel I-G04, I-G05, I-G08, I-G10 Material: Cast iron Y-G02, Y-G03 Material: Carbon steel Y-G04, Y-G05, Y-G08, Y-G10 Material: Cast iron R1 R1 ND hole H10 Axis d9 ND hole H10 Axis d9 MM MM (mm) L NZ NX L NZ NX E1 E1 Applicable bore size

XM, XY

changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 Part no. Y-MU02 Y-MU03 Y-MU04 Y-MU05 Part no. I-MU02 I-MU03 I-MU04 I-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 MLGP RLQ Knuckle pin and snap ring are included.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

button: White color) 2, 3.2, 4, 6, 8, 10, 12 Inch size (Release button: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS321F-02 AS331F-02 R1/4 AS321F-03 AS331F-03 R3/8 AS421F-04 AS431F-04 R1/2 Note 1) AS121F-M5-02 applicable cylinder bore sizes are 2.5, 4, 6.

PSxx-OMT0005CN

02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V 1 k N.C.

IDX-OM-W094

GWP (GWP) GWP Regulation (EU) No 517/2014 Regulation EU No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 2,088 2,090 R410A 1 IDFA60/70/80/90 Series 7-2 IDX-OM-W094 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFA60 R1 307 745 605 161 405 681 94 71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890

CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 20 20 I-G02SUS Y-G02SUS 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

Table of Contents

Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

VZA2000

258-9200-www.stevenengineering.com Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5

SX

R1 OMRON Corp.: CompoBus/S System (16 output points) SS5X3-45SA-05U-C61 set (45S with serial 5-station manifold base no.) SX3140-5LOZ2 sets (Single solenoid part no.) SX3240-5LOZ3 sets (Double solenoid part no.)

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1

IDX-OM-W093

35 40 32 /AC200V (50Hz) /AC200/220V (60Hz) () 10%4 7-2 200V 770/910 1260/1590 1770/2170 2270/2960 5) 50/60Hz W 200V 790/970 1150/1380 1700/2160 2330/2980 200V 4.2/4.6 6.7/7.9 9.7/10.9 11.8/14.8 5) 50/60Hz A 200V 3.0/3.2 4.3/4.4 6.5/6.8 8.9/9.1 (30mA) 6) A 200V 10 15 20 30 200V 15 20 10 R410AHFC)GWP2,0887 200V 39010 53010 63010 78010 g 200V 34010 52010 74010 75010 0.1MPa 12 mm R2 R1